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Home2009May

Month: May 2009

TechConnect Proceedings Papers

Effect of Nonlinear Structural Stiffness on the Response of Capacitive MEMS Devices

Shavezipur M., Nieva P., Khajepour A., Hashemi S.M., University of Waterloo, CA
In this paper, a design technique is presented that can linearize the response of MEMS capacitive elements such as tunable capacitors, capacitive sensors and out-of-plane electrostatic actuators. The method combinations the electrode flexibility and nonlinear [...]

Silicon die self-alignment on a wafer: stable and instable modes

Berthier J., Grossi F., Di Cioccio L., CEA/LETI/MINATEC, FR
To create advanced Microsystems by 3D integration, die-to-wafer assembly is required to obtain fast and reliable packaging. In order to overcome the main difficulties of current techniques, self-assembly methods are promising due to their serial [...]

A Parallel-plate-based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response

Shavezipur M., Nieva P., Khajepour A., Hashemi S.M., University of Waterloo, CA
Conventional designs for MEMS parallel-plate tunable capacitor suggest rectangular electrodes and linear structural stiffness which offer high Q-factor and quick responses; however, they have low tunability of 50% and nonlinear capacitance-voltage responses. This paper presents [...]

An Online Tool for Simulating Electro-Thermo-Mechanical Flexures Using Distributed and Lumped Analyses

Li F., Clark J.V., Purdue University, US
We present an online software tool that enables both novices and experts to quickly and fairly accurately model and simulate an electro-thermo-mechanical microdevice. We model and simulate a MEMS thermal actuator by coupling finite element [...]

Modification of rubber surface with hydrogenated diamond-like carbon thin films

Pei Y.T., Bui X.L., De Hosson J.Th.M., University of Groningen, NL
Thin films of hydrogenated diamond-like carbon (DLC) have been deposited on hydrogenated nitrile butadiene rubber (HNBR) for reduction of friction and enhancement of wear resistance of dynamic rubber seals, by sputtering graphite targets in C2H2/Ar [...]

Oxylink™: Improved resistance for water borne coatings

Pilotek S., Burgard D., Herold M., Steingröver K., Buhler Inc., US
The overall market share of environmentally friendly water borne coatings is small compared to solvent borne alternatives. Today, they are used in a wide selection of market segments, such as wood and furniture, but also [...]

Nanoscale UV-absorber for sustainable paint and coating applications

Wessels W., Nolte U., Berkei M., BYK Chemie GmbH, DE
Innovative nanomaterials are finding their way into paints, coatings, and plastics applications. Beside improving or modifying the mechanical polymer properties, giving higher scratch resistance for example, nanoscale materials like CeO2 are applied to improve UV [...]

The Next Generation of Proteomic Nanochips for Biomarker Discovery

Hu Y., Tasciotti E., Bouamrani A., Liu X., Li L., Liu X., Ferrari M., The University of Texas at Austin, US
In this study, the nanoporous silica thin films (NSTF) were chosen for the reproducible fractionation and selective binding of the serum-based low molecular weight proteome (LMWP). It has been recognized that the collection of LMWP [...]

Analysis of the Liquid Mediated Friction during Alignment in NIL Process

Kang S-H, Park S.H., Lee W.I., Seoul National University, KR
When Nano-Imprint Lithography (NIL) process is adopted in the large area applications like display, the stiction phenomenon which is the adhesion or in-plane friction between mold and substrate to disturb fine alignment process can be [...]

Cobalt doped ZnO prepared by electrochemistry: chemistry, morphology, and magnetism

Enculescu I., Matei E., Vasilache V., Teodorescu C.-M., National Institute of Materials Physics, RO
Pure and cobalt-doped ZnO films were electrodeposited from zinc and cobalt nitrate aqueous solutions on platinum substrates and investigated by X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and magneto-optical Kerr effect (MOKE). X-ray photoelectron [...]

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