Papers – Page 14 – TechConnect Briefs

A Study on Alleviating Deformation of MEMS Structure and Prediction of Residual Stress in Surface Micromachining

Kweon S., Hong S., Shin H., Jeon B., Samsung Advanced Institute of Technology, KR

When MEMS Structure, like RF switch, manufactured in high temperature is cooled down to the room temperature, the difference of the thermal expansion coefficients of structural materials, which are aluminum layer for electrical function and [...]

Microfabricated Heteroepitaxial Oxide Structures on Silicon for Bolometric Arrays

Kim J.H., Grishin A.M., KTH Royal Institue of Technology, SE

To realize high sensitive bolometer, new material with higher TCR value is needed including the low thermal mass : small pixel size and very thin thermally isolated membrane. Mixed-valent manganese, perovskite La0.67(Sr, Ca)0.33MnO3 (LSCMO) films [...]

A Tunable Dispersive Optical System

Shieh K-W, Hsieh J., Chou H-Y, Precsion Instrument Development Center, TW

Pitch-tunable gratings can find many applications and have been widely investigated. However, they are limited to out-of plane type, which increase the cost for alignment and assembly. Instead, an in-plane type can built more micro [...]

Packaging Design with Thermal Analysis of LED on Silicon Substrate

Tsou C., Huang Y.S., Li H.C., Lai T.S., Feng Chia University, TW

In this paper, we demonstrate a package method for a package component of LED (Light Emitting Diode) using state of the art MEMS technologies and careful materials selection such as using a silicon substrate to [...]

Computer-Based Process Design Support for MEMS

Wagener A., Popp J., Schmidt T., Hahn K., University of Siegen, DE

A process management and development system for MEMS design is introduced. It allows the specification of processes for specific applications and the tracking of the development procedures. Unlike in microelectronics the process configuration for MEMS [...]

Fabrication and Characterization of MOS Transistor Tip Integrated Micro Cantilever

Lee S-H., Lim G., Moon W., Pohang University of Science and Technology, KR

In this paper, we fabricate and characterize the metal-oxide-semiconductor (MOS) transistor tip integrated micro cantilever, which is proposed for a future high-density data storage system. The integrated MOS transistor tip as the sensing part has [...]

The Design and Simulation of a Novel Out-of-plane Micro Electrostatic Actuator

Tsou C., Huang S.L., Lai T.S., Li H.C., Feng Chia University, TW

This paper presents a mechanism of developing a novel out-of-plane micro electrostatic actuator capable of causing large out-of-plane deflection. The proposed actuation mechanism is using the attraction force between the charged bodies to bend the [...]

MEMS-Based MHz Integrated Ultrasonic Nozzles with Applications to Micro/Nano Technologies

Tsai C.S., Tsai S.C., Song Y.L., Chou Y.F., Qiu G., Degiovanni E., Wang N., Cheng J.S., Tsai C.S., Tsai S.C., University of California Irvine, US

This paper reports on modeling/simulation and design, MEMS-based fabrication of MHz ultrasonic nozzles, and their applications to micro- and nano-technologies. The ultrasonic nozzle is made of a piezoelectric drive section and a silicon-resonator consisting of [...]

Design Optimization of a Surface Micromachined Electro-Thermal Beam Flexure Polysilicon Actuator

Atre A., Georgia Institute of Technology, US

Electro-thermal polysilicon actuators are widely employed in optical MEMS applications. These actuators are typically designed for maximum deflection (unloaded) or force (loaded) output characteristics. The optimal design methodology of the actuator has been investigated previously [...]

Design Optimisation of an Electrostatic MEMS Actuator with Low Spring Constant for an “Atom Chip”

Rouabah H.A., Gollasch C.O., Kraft M., University of Southampton, UK

The advance of MEMS based sensors and microfabrication techniques has facilitated innovative technologies such as so-called ‘atom chips’, where a cloud of ultra cold atoms in a Bose Einstein Condensate (BEC) is controlled and manipulated [...]