Papers – Page 33 – TechConnect Briefs

Modelling and Simulation of Mechanical, Thermal and Electrical Behaviour of Si Cantilever with Implanted Strain Gauge

Husak M., Jakovenko J., Kulha P., Vborn Z., Czech Technical University in Prague, CZ

The paper describes methodology of design of cantilever with implanted layers in Si monocrystal. In the paper there is characterized physical model of implanted strain gauges, various girder topologies are designed and basic technological steps [...]

A Vertical MOSFET for Charge Sensing in the Convex Corner of Si Microchannels

Lim G., Park C-S, Lyu H-K, Kim D.S., Shin J-K, Choi P., Lee M., Kyungpook National University, KP

In this paper, we will present a vertical MOSFET formed in the convex corner of silicon microchannels which might be useful for detecting charged biomolecules. The cross type microchannels have four MOSFETs and four pairs [...]

Extensions of Spring Model Approach for Continuum-based Topology Optimization of Compliant Mechanisms

Sharma M., Udeshi T., Zyvex Corporation, US

This paper extends spring model approach to include multiple output formulation at arbitrary angles for a given actuation at input port. Parallel assembly for Microsystems could benefit from devices optimized with this formulation. A new [...]

Development of the Multi-pixel X-ray Microcalorimeters

Kudo H., Nakamura T., Arakawa T., Ohtsuka S., Izumi T., Shoji S., Sato H., Kobayashi H., Mori K., Morita U., Homma T., Osaka T., Mitsuda K., Yamasaki N.Y., Fujimoto R., Iyomoto N., Oshima T., Futamoto K., Takei Y., Ichitsubo T., Fujimori T., Ishisaki Y., Morita U., Ohashi T., Kuroda Y., Onishi M., Otake K., Waseda University, JP

We are developing a multi-pixel x-ray microcalorimeters in order to realize good energy resolution x-ray imaging for future Japanese X-ray astronomy missions. The energy resolutions of 10eV at 6keV and 32x32 pixels of arrayed x-ray [...]

Simulation of Cantilever Beam Micro-switch Pull-in and Collapse Voltages

Reid J.R., Starman L.A., Air Force Research Laboratory, US

Simulations of cantilever beam micro-switches such as those shown in Figure 1 exhibit two important operational voltages: the pull-in voltage when contact is initiated at the landing electrode, and the collapse voltage when the cantilever [...]

MEMS Gyroscopes with Structurally Decoupled 2-DOF Drive and Sense Mode Oscillators

Acar C., Shkel A.M., University of California Irvine, US

This paper reports a novel 4 degrees-of-freedom (DOF) non-resonant micromachined gyroscope design concept that addresses two major MEMS gyroscope design challenges: eliminating the mode-matching requirement, and minimizing instability and drift due to mechanical coupling between [...]

A Nanoscopic Rotary Electrostatic Motor

Wright J.H., Sheehan D.P., Schubert Jr. T.F., University of San Diego, US

A Nanoscopic Rotary Electrostatic Motor [J.H. Wright (Dept. Mathematics and Computer Science), and D.P. Sheehan (Dept. Physics), University of San Diego, San Diego, CA 92110] A novel, rotary, sub-micron, solid-state motor is introduced that uses [...]

Dynamically Amplified Rate Integrating Gyroscopes

Painter C., Shkel A., University of California Irvine, US

The paper presents the design, modeling, simulation, and initial characterization of a novel MEMS vibratory rate integrating gyroscope, which uses a dual mass architecture. In contrast to conventional micromachined vibratory gyroscopes which measure angular rate, [...]

High-fidelity MEMS Switch Model

Park K.C., Park Y.H., Miyazaki Y., Park K.C., Park Y.H., University of Colorado at Boulder, US

MEMS switches have used in a wide variety of microwave applications because of low loss and small measurable signal distortion since the switching action is accomplished by mechanical contact. While various microswitches are currently being [...]

Coupled Substrate-resonator-electrostatic Simulation and Validation fo High-Q MEMS Resonator Performance

Park K.C., Park Y.H., Park K.C., Park Y.H., University of Colorado at Boulder, US

Vibration energy transmission from MEMS resonator through anchor to substrate, viz., anchor loss, is examined by utilizing the coupled substrate-resonator-electrostatic numerical model. The resonator is electrostatically excited beam-type structure anchored at both ends onto multi-layered [...]