Sensors – Chemical, Physical & Bio – Page 27

Silex offers sub 50 um pitch for through wafer connections in up to 600 um thick substrates

Bauer T., Silex Microsystems, SE

The silicon via process developed by Silex offers sub 50 um via pitch for through wafer connections in up to 600 um thick wafers. Silex via process enables MEMS designs with significantly reduced die size [...]

Angular Orientation-Specific Directed Self-assembly Enabling the Integration of Small Dies

Knuesel R.J., Bose S., Zheng W., Jacobs H.O., University of Minnesota, US

We report on recent progress in the directed self-assembly of discrete high performance semiconductor device components. Different from prior research, the goal is to enable the integration of ultra small dies (10-100 micrometer in size) [...]

Development of Materials and Sensors for the U.S. Army’s Active Coatings Technology Program

Zunino III J.L., U.S. Army ARDEC, US

The ability to custom build and integrate novel technologies into functionalized systems is the driving force towards the creation and advancement of active coatings systems. Active coating systems require the development and advancement of numerous [...]

Design and Characterization of new GaAs Micromechanical Thermal Converter developed for Microwave Power Sensor

Jakovenko J., Husak M., Lalinsky T., Czech Technical University in Prague, Faculty of Electrical Engineering, CZ

In this report we demonstrate the design of new GaAs based Micromechanical thermal converter (MTC) that creates heart of the RF power sensor microsystem. Transmitted power is the main quantity measured in RF systems. The [...]

Sensors & MEMS

Trade-Offs in Cooperative Goal Seek using Nano-Devices

Chnadrasekaran S., Hougen D.F., Oklahoma University, US

Micro and nano-scale devices and systems require not only nano-scale components but also minimalistic hardware design and control methodologies. When constructing mobile nano-devices, the numbers of motors and sensors should be reduced and the control [...]

Sensitivity of Initially Stressed Un-symmetric Micro-Layered Plate in Large Deflection due to Lateral Load

Chen C-F, Chung-Hua University, TW

Initial tension often arises in a typical micro-fabrication process. It has been well recognized that the magnitude of initial tension could be high enough to cause a serious degradation in structural performance such as the [...]

A Nanoporous Silicon 1-D Photonic Band Gap Microcavity as a Selective Optical Sensor

Chappel S., DeLouise L., Gersten B., Queens College, US

A nanoporous silicon (pSi) one dimensional photonic band gap (1-D PBG) with a microcavity was prepared for selective sensing in the optical regime. The cavity resonance of the localized mode was tuned by the thickness [...]

Electrospun TiO2 nanofibers for gas sensing applications

Kim D.Y., Kim I-D, Rothschild A., Tuller H.L., Kim D.Y., Kim I-D, Jo S.M., Korea Institute of Science and Technology, KR

TiO2 fiber mats were deposited onto Al2O3 substrates with interdigitated Pt electrodes by means of electrospinning from a solution of DMF and PVAc synthesized using bulk radical polymerization of titanium propoxide and acetic acid as [...]

An Analytical Model for Multi-layer and Multi-electrode Piezoelectric Ceramic Actuators

Wang B-L., Mai Y-W., The University of Sydney, AU

The use of piezoelectric ceramics in multilayer actuator is increasing. This paper studies electroelastic field concentrations ahead of electrodes for multilayer piezoelectric actuators. The electrodes are vertical to and terminated near the edges of the [...]