MEMS & NEMS Devices, Modeling & Applications – Page 8

Virtual pivot point MEMS rotary comb actuator with externally mounted mirror for optical applications

Amin T.M.F., Huda M.Q., Tulip J., Jäger W., University of Alberta, CA

The design, fabrication, and characterization of a virtual pivot MEMS actuator with externally mounted mirror is presented. The provision for an externally mounted mirror can be useful for many optical applications which require large and [...]

Hermetic room temperature glass welding technology

Lunden H., Kumpulainen T., Määttänen A., Vihinen J., Primoceler Ltd, FI

The aim of this study was to find an alternative method for conventional glass-glass bonding. The goal was to minimize heat affect, shorten process time, and avoid use of additive materials but still obtain excellent [...]

AFM/SNOM Cantilever Probe Serial Fabrication Process with Controlled Tip Nanoaperture

Tsigara A., Belier B., Maillard F., Falgayrettes P., Nativel E., Kribich R., Gall-Borrut P., Universite Paris Sud, FR

In this paper we present the microfabrication steps of sol gel and polymer (SU8) based cantilever probe systems using an alternative batch front face fabrication process. The probes are consisting of cantilevers with pyramidal nanoengineered [...]

Precision Micro-Optical Elements for Manufacturing of Gas Sensors using IR-Absorption

Quenzer H.-J., Janes J., Stenchly V., Schwarzelbach S., Wagner B., Dudde R., Fraunhofer Inst. Silicon Technology, DE

A new process technology has been developed by Fraunhofer Institute Silicon Technology for manufacturing precise optical components from borosilicate glass by eight inch wafer batch processing. Glass forms are produced by a contact-less glass flow [...]

Aerospace Applications for Surface Acoustic Wave Devices

Wilson W., NASA Langley Research Center, US

Surface acoustic wave (SAW) technology can be used to create a variety of different sensors, including strain, chemical, pressure, and temperature. These sensors can be configured to be passive and wireless, which could be useful [...]

MEMS & NEMS Devices & Applications

Nanolayer Interconnect Structures Ageing by Beam Resonance Method

Janczyk G., Bieniek T., Instytut Technologii Elektronowej, PL

This paper discusses important aspects of investigation on interconnects reliability and ageing which has to be considered in nanoscale. The research is ongoing and applies to structures like SiP, SoC where mechanical stress caused by [...]

New Powerful Method Based on Electrical Harmonic Distortion Analysis for Electromechanical Characterizations of MEMS Devices

Bounouh A., Bélières D., LNE, FR

This paper presents a new, cheap and accurate experimental method based on electrical harmonic distortion analysis to determine mechanical characteristics (resonant frequency) of MEMS devices used in widespread applications as in energy scavenging, cantilever-based microsystems [...]

Nanoceramic MEMS Sensors for Universal Embedded Chemical Sensing

Kostelecky C.J., Sneider C., Wind R., Deininger D.J., Synkera Technologies, Inc., US

This abstract describes recent developments in a nanoceramic MEMS platform used for chemical sensing. These advances enable the addition of environmental awareness to many other consumer and commercial devices, including smart phones.

Design and Analysis of Vibration Based Energy Harvester for Precision Agriculture

Aris H., Fitrio D., Singh J., La Trobe University, AU

The world population has increased by more than double in the past three decades and as a result the food supply required per capita has tremendously increases. However, as reported by United Nation Food and [...]