This abstract describes recent developments in a nanoceramic MEMS platform used for chemical sensing. These advances enable the addition of environmental awareness to many other consumer and commercial devices, including smart phones.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: May 12, 2013
Pages: 209 - 212
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications