Nanoceramic MEMS Sensors for Universal Embedded Chemical Sensing

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This abstract describes recent developments in a nanoceramic MEMS platform used for chemical sensing. These advances enable the addition of environmental awareness to many other consumer and commercial devices, including smart phones.

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Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: May 12, 2013
Pages: 209 - 212
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4822-0584-8