MEMS & NEMS Devices, Modeling & Applications – Page 73

Optimal Shape Design of Three-Dimensional MEMS with Applications to Electrostatic Comb Drives

Ye W., Mukherjee S., Cornell University, US

A methodology for solving inverse problems in Microelectromechanical (MEM) systems is proposed in this paper. Design of variable shape electrostatic comb drives (shape motors), in order to obtain desired force profiles, is presented as an [...]

An Integrated Pressure Sensor with High Performance

Lee B.N., Kim K.N., Park H.D., Shin S-M, Korea Electronics Technology Institute, KR

A bipolar integrated pressure sensor had been designed and simulated. The ion-implanted resistors with temperature coeffcient of 1700pm/?C and 4700ppm/?C were used for calibration and temperature compensation. Ion-implanted resistors are simultaneouslv fabricated with base and [...]

Dynamic Effects of Linkage Joints in Electrostatic Microengines

Allen J.J., Miller S.L., LaVigne G.F., Rodgers M.S., Eaton W.P., Sandia National Laboratories, US

The electrostatic microengine is one of the major actuators used in MEMS applications. To ensure this MEMS actuator is operated in a fashion that will produce peak performance and long life, the system dynamics must [...]

Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm

Correia J.H., Bartek M., Wolffenbuttel R.F., Delft University of Technology, NL

Finite-Element-Methods (FEM) has been used to study the behavior of a non-planar composite diaphragm, which is to be used in a tunable Fabry-Perot-based silicon microinterferometer. The composite (Ag-mirrorAow-stress SiN membrane/Si-frame) diaphragm used exhibits: excellent flatness, [...]

On the Vibrations of a MEMS Gyroscope

Davis W.O., Pisano A.P., UC-Berkeley, US

In this paper, the dynamics of a dual-axis MEMS gyroscope are examined. The model for the device is based on a non-linear rod theory developed by A. E. Green, P. M. Naghdi and several co-workers. [...]

Micromachined Accelerometer Design, Modeling and Validation

Davies B.R., Bateman V.I., Brown F.A., Montague S., Murray J.R., Rey D., Smith J.H., Sandia National Laboratories, US

Micromachining technologies enable the development of low-cosr devices capable of sensing motion in a reliable and accurate manner. The development of various surface micromachined accelerometers and gyroscopes to sense motion is an ongoing activity at [...]

Modeling and Characterization of an Integrated FET Accelerometer

Kniffin M.L., Wiegele T.G., Masquelier M.P., Fu H., Whitfield J., Motorola, Inc., US

The GFET accelerometer is an integrated inertial sensor based on a movable-gate field effect transistor. The complexity of the transduction principle and the tight tolerances associated with its manufacture necessitated a large range of simulation [...]

Hierarchical Representation and Simulation of Micromachined Inertial Sensors

Vandemeer J.E., Kranz M.S., Fedder G.K., Carnegie Mellon University, US

A circuit-level methodology for simulating micromachined inertial sensors based on a hierarchical representation of microelectromechanical systems (MEMS) is presented. In the NODAS methodology 2dal Design of Actuators and Sensors), microaccelerometers and microgyroscopes are designed as [...]

Applications: Pressure, Actuation, Navigation

Thermal Behavior of a V-MCM Package Containing a Thermo-Pneumatic Micropump, Sensors and Integrated Electronics

Sieiro J., Morrissey A., Carmona M., Marco S., Samitier J., Alderman J., Universitat de Barcelona, ES

This paper descubes the thermal behaviour of vertical multichip module (V-MCM) devised within the BARMINT Esprit Project. It encloses an stack of elements including several ICs. a micromachined pump, and a multisensor chip provided with [...]