MEMS & NEMS Devices, Modeling & Applications – Page 64

Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS

Jing Q., Mukherjee T., Fedder G.K., Carnegie Mellon University, US

MEMS design in NODAS is based on a geometrically intuitive schematic representation of MEMS using a small set of atomic elements (anchors, beams, plates and electrostatic gaps), each of which is associated with a geometrically [...]

Integrated Modeling of Optical MEMS Subsystems

Stoll R., Plowman T., Winick D., Morris A., Coventor, US

This paper presents top-down holistic design and verification of a MEMS-based 3-D optical switching subsystem utilizing an integrated CAD environment. The subsystem design takes place in a nodal simulation environment that includes models for fibers, [...]

Improving Trajectory Piecewise-Linear Approach to Nonlinear Model Order Reduction for Microm䁡chined Devices Using an Aggregated Projection Basis

Rewienski M., White J.K., Massachusetts Institute of Technology, US

In this paper we present an improved algorithm for nonlinear model order reduction (MOR) based on the trajectory piecewise-linear method proposed in [6] which, as shown before, provides an e ective and eÆcient strategy for [...]

Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators

Sattler R., Schrag G., Wachutka G., Münich University of Technology, DE

We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which enables the inclusion of damping effects in system level models of entire microsystems in a natural, physical-based, and flexible [...]

Modeling, Simulation and Design of Piezoelectric Micro-Hydraulic Transducer Devices

Yaglioglu O., Su Y.H., Roberts D.C., Carretero J., Hagood N.W., Massachusetts Institute of Technology, US

This paper reports on modeling, simulation and design considerations for piezoelectric Micro-Hydraulic Transducer (MHT) systems, focusing on power generation applications. Since these devices are complex fluid and structural systems, comprehensive simulation tools are needed for [...]

System Level Modeling of MEMS

Finite Element Analysis in the Development of MEMS-based Compound Grating (MCG)

Yao Y., Castracane J., Xu B., Olson S., Eisden J.V., University at Albany-SUNY, US

This paper presents the development of the 1 mm ruled MEMS-based Compound Grating (MCG) in which the structural material of the rulings is SiO2 coated with Cr/Au as the top electrode. The MEMS simulation package [...]

Modeling and Simulation on Two Passive Feedback Methods to Obtain Large Travel Range of Electrostatic Micro Mirrors

Wu X.T., Xiao Z.X., Zhe J., Farmer K.R., New Jersey Institute of Technology, US

This paper demonstrates two passive feedback methods to obtain increased travel range in electrostatic micro actuators directly in the electrostatic domain. The first method is modeled as a series capacitor loop in which an integrated [...]

Eigenvalue Analysis of Tunable Micro-mechanical Actuator

Lee W-S., Kwon K-C., Kim B-K., Cho J-H., Youn S-K., KAIST, KR

An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the [...]

Modeling the Effects of Joint Clearances in Planar Micromechanisms

Wittwer J.W., Howell L.L., Chase K.W., Brigham Young University, US

Surface micromachining of micro-electro-mechanical systems (MEMS) has inherent limitations that can lead to mechanisms having an undesirable amount of clearance in revolute and prismatic joints. In micro devices, where actua-tion of the mechanisms is often [...]