MEMS & NEMS Devices, Modeling & Applications – Page 46

A New 3D Model of The Electro-Mechanical Response of Piezoelectric Structures

Elata D., Elka E., Abramovich H., Technion – Israel Institute of Technology, IL

The constitutive equations of multi-layered piezoelectric structures are derived in a new form. In this form, the electromechanical coupling is presented as an additional stiffness matrix. This matrix is a true property of the piezoelectric [...]

Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators

Atre A., Boedo S., Rochester Institute of Technology, US

Electrically heated, thermally driven, surface micromachined polysilicon beam flexure thermal actuators have been investigated using analytical methods that employ constant material properties either taken at room temperature or based on a set of averaged temperatures [...]

Design and Modeling of a 3D Micromachined Accelerometer

Ghafari S.H., Golnaraghi M.F., Mansour R., University of Waterloo, CA

This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor [...]

A Model for Thermoelastic Damping in Microplates

Nayfeh A.H., Younis M.I., Virginia Tech, US

We present a model and analytical expressions for the quality factors of microplates due to thermoelastic damping. We solve the heat equation for the thermal current across the thickness of a microplate, and hence decouple [...]

Microplate Modeling under Coupled Structural-Fluidic-Electrostatic Forces

Younis M.I., Nayfeh A.H., Virginia Tech, US

We present a model for the dynamic behavior of microplates under the coupled effects of squeeze-film damping, electrostatic actuation, and mechanical forces. The model simulates the dynamics of microplates and predicts their quality factors under [...]

Dynamic Simulation of an Electrostatically Actuated Impact Microactuator

Zhao X., Dankowicz H., Reddy C.K., Nayfeh A.H., Virginia Tech, US

We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law [...]

Compact Models for Squeeze-Film Damping in the Slip Flow Regime

Sattler R., Wachutka G., Technical Univeristy of Münich, DE

We propose a mixed-level simulation scheme for squeeze film damping effects in microdevices, which makes it possible to include damping effects in system-level models of entire microsystems in a natural, physically-based and flexible way. Our [...]

Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes

Musson L.C., Ho P., Plimpton S.J., Schmidt R.C., Sandia National Laboratories, US

The surface micromachining processes used to manufacture MEMS devices and integrated circuits transpire at such small length scales and are sufficiently complex that theoretical analysis of them is particularly inviting. Under development at Sandia National [...]

Extending the Validity of Existing Squeezed-Film Damper Models with Elongations of Surface Dimensions

Veijola T., Pursula A., Helsinki University of Technology, FI

Border flow effects in squeezed-film dampers having a gap separation comparable with the surface dimensions are studied with 2D and 3D FEM simulations and with analytic models derived from the linearized Reynolds equation for small [...]

Circuit Modeling and Simulation of Integrated Microfluidic Systems

Chatterjee A.N., Aluru N.R., Beckman Institute, US

A combined circuit-device model for the analysis of integrated microfluidic system is presented. The complete model of an integrated microfluidic device incorporates modeling of the fluidic transport, chemical reaction, reagent mixing and separation. The microfluidic [...]