MEMS & NEMS Devices, Modeling & Applications – Page 44

On the Air Damping of Micro-Resonators in the Free-Molecular Region

Hutcherson S., Ye W., Georgia Institute of Technology, US

Predicting air damping on micromachined mechanical resonators is crucial in the design of high-performance filters used in wireless communication systems. In the past, most of the work focused on devices with minimum feature size on [...]

Identification of Anisoelasticity and Nonproportional Damping in MEMS Gyroscopes

Phani A.S., Seshia A.A., University of Cambridge, UK

A novel approach to identify nonproportional damping and structural anisoelasticities in vibratory MEMS gyroscopes is proposed in this paper. The proposed identification method is based on measured vibration data in the form of frequency response [...]

Numerical Modeling of a Piezoelectric Micropump

Schlipf R., Haghighi K., Lange R., Purdue University, US

An effective description and an accurate understanding of any pumping mechanism is critical, especially of the micro scale. With the existence of a comprehensive and adaptable model, accurate preproduction predictions of performance are realized. Optimal [...]

Coupling Of Resonant Modes In Micromechanical Vibratory Rate Gyroscopes

Phani A.S., Seshia A.A., Palaniapan M., Howe R.T., Yasaitis J., University of Cambridge, UK

Analytical models are presented to describe the resonant modal coupling behaviour of z-axis micromechanical vibratory rate gyroscopes fabricated in an integrated polysilicon surface micromachining process. The models are then applied to predict the extent of [...]

Compliant Force Amplifier Mechanisms for Surface Micromachined Resonant Accelerometers

Pedersen C.B.W., Seshia A.A., University of Cambridge, UK

The present work deals with the optimization of a compliant force amplifier mechanism in a surface micromachined resonant accelerometer. Figures of merit including noise floor and scale factor are critically dependent on the gain of [...]

Interdigitated Low-Loss Ohmic RF-MEMS Switches

Gaddi R., Bellei M., Gnudi A., Margesin B., Giacomozzi F., ARCES - University of Bologna, IT

An interdigitated design for MEMS RF-switches is applied to both a shunt and a series ohmic contact configuration. Interdigitated Al-Ti-TiN RF-signal paths and poly actuation electrodes are arranged underneath an electrodeposited gold plate, suspended by [...]

New Accurate 3-D Finite Element Technology for Solving Geometrically Complex Coupled-Field Problems

Avdeev I., Gyimesi M., Lovell M., Ostergaard D., University of Pittsburgh, US

Increased functionality of microelectromechanical systems (MEMS) has lead to the development of micro-scale devices that are geometrically complex. These complex configurations require the development of new and more efficient finite element (FE) techniques for modeling [...]

Function-Oriented Geometric Design Approach To Surface Micromachined MEMS

Gao F., Hong Y.S., University of Toledo, US

Geometric modeling is an important aspect of MEMS design. It not only creates geometric model for visual evaluation, but also supplies input for device performance analysis. This paper focuses on developing a feature-based geometric design [...]

Dynamic Modeling and Input Shaping for MEMS

Popa D.O., Wen J.T., Stephanou H.E., Skidmore G., Ellis M., Rensselaer Polytechnic Institute, US

In this paper we show that the dynamic performance of MEMS devices can be significantly enhanced using reduced-order modeling techniques and open-loop control via input shaping. Specifically, we apply this methodology to a variety of [...]

Computationally Efficient Dynamic Modeling of MEMS

Popa D.O., Critchley J., Sadowski M., Anderson K.S., Skidmore G., Rensselaer Polytechnic Institute, US

Traditional modeling work in MEMS includes simplified PDE/ODE formulation, based on physical principles, and Finite Element Analysis. More recently, reduced order modeling techniques using Krylov subspace decomposition have been proposed in the context of nodal [...]