Characterization of Nanaoporous Low-Dielectric Constant SiCOH Films using Organosilane Precursor

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The grazing incidence small-angle X-ray scattering (GISAXS) and X-ray reflectivity (XR) analysis were performed to investigate the nanoporous structure of low dielectric constant carbon-doped silicon oxide (SiCOH) films, which were deposited with plasma enhanced chemical [...]

Characterisation of Electrical Fields of Buried Interdigitated Nanoscale Ti-Electrode Arrays by a Novel Atomic Force Microscopy Measurement Procedure and Their Fabrication by FIB Milling

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The fabrication and characterisation of interdigitated titanium nanoelectrode arrays with 500nm and 50nm width and spacing is described in this work. The electrical-field above the fabricated 500nm electrodes can be sensed by means of a [...]