Characterization of Nanaoporous Low-Dielectric Constant SiCOH Films using Organosilane Precursor
Heo K., Park S.-G., Yoon J., Jin K.S., Jin S., Jin K.S., Jin S., Rhee S.W., Ree M., Pohang University of Science and Technology, KR
The grazing incidence small-angle X-ray scattering (GISAXS) and X-ray reflectivity (XR) analysis were performed to investigate the nanoporous structure of low dielectric constant carbon-doped silicon oxide (SiCOH) films, which were deposited with plasma enhanced chemical [...]