Advanced Manufacturing – Page 43

High resolution Nanolithography using Focused Ion Beam Scanning Electron Microscopy (FIB SEM)

Wilhelmi O., Roussel L, Stokes D.J., Hubert D.H.W., FEI Company, NL

State-of-the-art FIB technology combined with high-performance SEM is making a big impact on nanotechnology, particularly with the ability to use either focused ions or electrons to perform advanced nanolithography. Achieving the highest standards requires an [...]

Novel lithography technique using an ASML stepper/scanner for the manufacture of display devices in MEMS world

Best K., Raval P., Kappel N., Yang C., Wang M., Jeewakhan N., Prejda M., Kassekert K., Moore M., ASML USA, Inc - Special Applications, US

In the MEMS and MOEMS product world, manufacturer of display/micro-devices requires bonding of two wafers. The front side pattern of the top wafer needs to be aligned with aggressive overlay requirement with the remaining portion [...]

Lithography and Patterning

A Nano-Scale Module with Full Spin-Wave Interconnectivity for Integrated Circuits

Eshaghian-Wilner M.M., Khitun A., Navab S., Wang K.L., UCLA, US

In this paper, we present a nanoscale computational architecture for integrated circuits where the nodes intercommunicate using Spin Waves. The key advantage of the proposed architecture is that the information transmission is accomplished without charge [...]

Approximate Pattern Matching in Nanotechnology

Annampedu V., Wagh M.D., Agere Systems Inc., US

Approximate pattern matching is comparing an unknown pattern with a database of stored patterns with a specified error tolerance. This ability to compensate for real world sensor errors makes approximate pattern matching an ideal choice [...]

Self-Healing Wire-Streaming Processors on 2-D Semiconductor Nanowire Fabrics

Wang T., Bennaser M., Guo Y., Moritz C.A., University of Massachusetts Amherst, US

One of the most promising underlying nanodevice technologies today for nanoscale integrated circuits are semiconductor nanowires (NWs) and arrays of crossed NWs. Researchers have already built FETs and diodes out of NWs. There has also [...]

The Pulsation Reactor Process – Large Scale Production of Nano-Sized Metal Oxide Powders in a Single Step

Fischer G., Leidolph L., Weitz U., IBU-tec, DE

A pulsed thermal reactor process was developed to produce nano particles on an industrial scale. Different precursors were applied to obtain the desired product properties. The applied techniques (pulsation reactor) are explained and different applications [...]

Solid-State, On-demand Gas Generators as “Pneumatic Batteries” for Micro-Electronic Actuators and Fluid Delivery

Sawka W.N., Digital Solid State Propulsion LLC, US

Newly developed electrically controlled extinguishable solid propellants (ESCSP) are capable of multiple ignitions, extinguishments and throttle/burn-rate control by the application of continuous electrical power. Both burn rate and mass of ECESP combusted is directly proportional [...]

Multiple Wafer Bonding Offers Increased Throughput of High Brightness LEDs

Pascual D.N., SUSS MicroTec, US

We have developed a new wafer-bonding process and equipment for significantly increasing the throughput of high-brightness light emitting diodes and other devices that could benefit from group semiconductor wafer bonding. I will present this solution [...]

Enlarge the distance of water molecules to incise microorganism cell-the development and application of nano-grade microorganism cell crushing machine

Hongwen Y., Suge G., Hebei University of Science and Technology, CN

We have developed a prototype nano-grade crushing machine that leads to improved yield. The machine utilizes ultrasound in connection with pressure as high as 3400 kg/cm2 to achieve final product with nanometer scale. We have [...]