Sensors, MEMS, Electronics – Page 403

Modeling and Characterization of an Integrated FET Accelerometer

Kniffin M.L., Wiegele T.G., Masquelier M.P., Fu H., Whitfield J., Motorola, Inc., US

The GFET accelerometer is an integrated inertial sensor based on a movable-gate field effect transistor. The complexity of the transduction principle and the tight tolerances associated with its manufacture necessitated a large range of simulation [...]

Hierarchical Representation and Simulation of Micromachined Inertial Sensors

Vandemeer J.E., Kranz M.S., Fedder G.K., Carnegie Mellon University, US

A circuit-level methodology for simulating micromachined inertial sensors based on a hierarchical representation of microelectromechanical systems (MEMS) is presented. In the NODAS methodology 2dal Design of Actuators and Sensors), microaccelerometers and microgyroscopes are designed as [...]

Applications: Pressure, Actuation, Navigation

Analysis of Pressure Balanced MEMS Valves

Yang F., Kao I., SUNY-Stony Brook, US

Based on simple plate theory and the Bernoulli equation, the effect of fluid flow on the deformation of fluid driven MEMS diaphragm microvalve is investigated analytically and numerically. The static instability of such a microsystem [...]

Modeling and Validation of Flow-Structure Interactions in Passive Micro Valves

Oosterbroek R.E., Schlautmann S., Berenschot J.W., Lammerink T.S.J., van den Berg A., Elwenspoek M.C., University of TWente, NL

This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained [...]

Modeling 3-D Fluid Flow for a MEMS Laminar Proportional Amplifier

Athavale M.M., Li H.Y., Przekwas A.J., Piekarski B.H., Zeto R.J., Tenney S.M., CFD Research Corporation, US

Fluid flow in a microfluidic laminar proportional amplifier (LPA) was simulated using an advanced 3-D flow solver, CFD-ACE+. Pressure gains for single-stage and two-stage blocked output LPAs were calculated under a variety of flow conditions [...]

Modeling Strategies for Microsystems

Voigt P., Schrag G., König E-R, Wachutka G., Technical University of Münich, DE

A hierarchical approach to microsystem modeling is outlined. On the device level, the operating behavior is analyzed on the basis of continuous field models To deal with the coupling effects typical of microsystems, various coupling [...]

Modeling of a Piezo Paddle Mikro Pump

Ederer I., Technical University of Münich, DE

In this paper an analytical method will be presentea to describe the behavior of a piezo electric paddle pump. For that, mechanical and fluidic mechanism are combined in a one mass oscillator model with fluidic [...]

Modeling and Design Optimization of a Novel Micropump

Klein A., Matsumoto S., Gerlach G., Dresden University of Technology, DE

The purpose of this paper is to give an overview about the design process of a new-type micropump. Four different coupled physical domains must be considered. The coupling effects on the pysical level are modeled [...]

Computational Modeling of Microfluid Devices with Free Surface Liquid Handling

Yang H.Q., Przekwas A.J., CFD Research Corporation, US

Integrated Microfluidic Systems are the subject of great scientific and commercial interest for a wide range of applications, including the biomedical, environmental, automotive, aerospace, and defense. This paper presents the computational methodology used in the [...]