The purpose of this paper is to give an overview about the design process of a new-type micropump. Four different coupled physical domains must be considered. The coupling effects on the pysical level are modeled using only commercially available finite element tools. Fiom these simulations, a lumped network model is constructed and assigned with parameters. in order to optimize the design of the system. Based on ne simulation results, the first prototype of the pump was fabricated and tested. It proved, that the investigated pumping effect can be used for microfluidic applications.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 506 - 511
Industry sector: Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip