Papers – Page 985 – TechConnect Briefs

Concept of an Intelligent Microsystem Structure for Communication with Real Surrounding Space

Husak M., Jakovenko J., Czech Technical University, CZ

In the paper, concept of intelligent microsystem structure is presented. This concept is applicable in general surrounding environment. Concrete model of an intelligent temperature microsystem for control purposes is designed. Microsystem function has been verified [...]

Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Loughlin J.P., Fettig R.K., Moseley S.H., Kutyrev A.S., Mott D.B., NASA/Goddard Space Flight Center, US

Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5mm silicon nitride micro-shutter for use in a space-based Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go [...]

Analytical Pull-in Study on Non-Deformable Electrostatic Micro Actuators

Zhe J., Wu X., Cheng J., Wang J., Farmer K.R., Frechette L., Modi V., Columbia University, US

A general theory and method was presented and employed to analyze the static behaviors of non-deformable electrostatic actuator systems with various electrode shapes. This method utilizes capacitance-based generalized equations and provides an easy and time [...]

Nonlinear Micromachined Flexure for Stiction Reduction

Shim D-H, Cho J-W, Samsung Advanced Institute of Technology, KR

This paper reports the nonlinear micromachined flexure to reduce the stiction in MicroElectroMechanical Systems (MEMS). Good electrical contacts are essential in the applications like MEMS switches or relays. In this case high contact forces are [...]

Simulation Based Design of O2 MEMS Sensor

Andjelic Z., Krippner P., Vogel A., ABB Corporate Research Center, DE

The paper presents the methodology for the Simulation Based Design (SBD) of MEMS sensors influenced by mechanical and electromagnetic phenomena. The complexity of the problems mostly asks for both the efficient 3D numerical technologies and [...]

Implementation of a Nonlinear Control Law for the Magnetostrictive Beam Vibrations by an Amplifier of Current to Current

Bereksi G.S., Center of Advanced European Studies and Research, DE

In this work, we start by giving a weak formulation of an ampli er of current to current network model and some estimations for the electrical current using graph theory. These estimations are interpreted in [...]

Simulation and Validation of Bulk Micromachined 6H-SiC High-g Piezoresistive Accelerometer

Atwell A.R., Okojie R.S., Kornegay K.T., Roberson S., Beliveau A., Cornell University, US

Quantum effects have been reported to play an important role in the operation of narrow width SOI devices, in which the carriers experience a two dimensional confinement in a square quantum well at the semiconductor-oxide [...]

Polysilicon Prototypes for Flip-bonded Hybrid MEM-tunable Filters and VCSELs

Ochoa E.M., Starman_Jr. L.A., Cowan W.D., Nelson_Jr. T.R., Blum Spahn O., Lott J.A., Air Force Institute of Technology, US

We characterize our novel mechanical structures for flip-bonded hybrid micro-electro-mechanically (MEM) tunable filters (MEM-TF) and MEM-tunable vertical cavity surface emitting lasers (MEM-TVCSELs) by comparing simulations with foundry fabricated actuators. Two of our prototypes, each with [...]

Modeling and Simulation of Silicon Microsystem of Chemical Signals

Daniel M., Szermer M., Slusarczyk K., Napieralski A., Technical University of Lodz, PL

The purpose of this paper is to introduce the new approach to the integrated microsystem oriented for water monitoring. Nowadays it becomes extremely important to analyze and estimate the chemical composition of water. Presented microsystem [...]

Simulation of Electrical Field Induced Particle Transfer

Hoffmann R., Wachutka G., Océ Printing Systems, DE

The controlled transfer of charged, densely distributed polymer particles across narrow air gaps is one of the basic mechanisms in modern printing technology. To understand the detachment and transport of charged particles by an electric [...]