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Vertically aligned carbon nanowires (CNWs): Top-down approach using photolithography and pyrolysis

Lee J.A., Lee S-W., Lee S.S., Lee J.A., Lee S-W., Lee S.S., Lee J.A., Lee S-W., Lee S.S., Korea Advanced Institute of Science and Technology (KAIST), KR
Top-down approach for vertically aligned CNWs has not reported yet although it is necessary for immediate integration of CNWs with micro and nano systems. In this paper, vertically aligned pyrolyzed carbon nanowires (CNWs) is fabricated [...]

Silylation Hardening for Mesoporous Silica Zeolite Film

Kikkawa T., Hiroshima University, JP
Pure silica zeolite films were prepared for ultra-low-k interlayer dielectrics in ultra-large integrated circuits by both hydrothermal crystallization using tertabuthylammonium hydroxide, tetraethylorthosilicate and ethylalcohol, and vapor phase transport synthesis using ethylene diamine and triethylamine. Self-assembled [...]

Fabrication & Integration of nanobolometer sensors on a MEMs process

Gilmartin S.F., Arshak A., Arshak K., Collins D., Bain D., Lane W.A., Korostynska O., Arshak A., Arshak K., McCarthy B., Newcomb S.B., Analog Devices, IE
In this paper, we report the fabrication of novel nanoscale bolometer sensor devices using conventional titanium and titanium-nitride metal films, with total bolometer film thicknesses ranging from 60-150nm. The bolometer devices we present are integrated [...]

Nanomaching of Silicon nanoporous Structures by Colloidal Gold Nanoparticle

Zhu J., Bart-Smith H., Begley M.R., Kelly R.G., Zangari G., Reed M.L., University of Virginia, US
We report an efficient method for fabricating nanoporous structures in crystalline silicon, using colloidal gold nanoparticles in HF/H2O2 etchant. Colloidal gold in HF/H2O2 solutions accelerates the etching rate by two orders of magnitude and simultaneously [...]

Periodic Nanowell Array using Template-Assisted Nanosphere Lithography

Jung S., Lee J., Seoul National University, KR
This paper presents a template-assisted nanosphere lithography(NSL) to obtain high-quality crystal in regularity and coverage(Figure 1). A periodic array of 100-nm deep, 360-450 nm wide nano-trenches was fabricated by nano imprint lithography(NIL), and used as [...]

A Novel Technique for Purifiction and Segregation of CNT Using Inkjet Technology

Chaves J.S., Chaves S., Chaves J.S., Chaves S., Mangir T., California State University Long Beach, US
Since Carbon Nanotubes (CNT) were discovered in the early 90’s a whole new research field has evolved. CNTs have many properties that make them desirable for the construction of nano-scale Electronics. One area that is [...]

Precision Placement and Integration of Individual Carbon Nanotubes in Nanodevices by Fountain-Pen controlled Dielectrophoresis

Schwamb T., Schirmer N., Poulikakos D., ETH Zürich, CH
Herein, we present a novel fabrication method for the integration of special nanoparticles such as nanowires and carbon nanotubes into NEMS/MEMS. To this end, we combined the dielectrophoretic deposition of carbon nanotubes with a fountain-pen [...]

Templated Self-Assembly of 5 nm Gold Nanoparticles

Ocola L.E., Lin X-M., Argonne National Laboratory, US
Combining top-down electron beam lithography and bottom-up colloidal chemical assembly can potentially lead to large scale patterning of nanocrystals on arbitary substates. Our approach consists of fabrication of templates from hydrogen silsesquioxane (HSQ) on treated [...]

A Novel Self-Assembled and Maskless Technique for Highly Uniform Arrays of Nano-Holes And Nano-Pillars

Wu W., Dey D., Memis O.G., Katsnelson A., Mohseni H., Northwestern University, US
We present a low-cost and high-throughput process for realization of two-dimensional arrays of deep sub-wavelength features using a self-assembled monolayer of HCP silica and polystyrene microspheres and well-developed photoresist lithography. This method utilizes the microspheres [...]

DNA-guided Assembly of Organized Nano-Architectures

Gang O., Maye M.M., Nykypanchuk D., Xiong H., van der Lelie D., Brookhaven National Laboratory, US
Incorporation of DNA into nano-object design provides a unique opportunity to establish highly selective and reversible interactions between the components of nanosystems. Assembly approaches based on the nano-object’s addressability promise powerful routes for creation of [...]

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