Papers – Page 606 – TechConnect Briefs

Pressure sensor data processing for vertical velocity measurement

Husak M., Jakovenko J., Stanislav L., Czech Technical University in Prague, CZ

There are design and realization of a sensor system for vertical velocity measurement using pressure sensor in the paper. Problem of nonlinearity due to the exponential function of air pressure versus altitude is discussed in [...]

Building Micro-Robots: A path to sub-mm3 autonomous systems

Reid J.R., Vasilyev V., Webster R.T., US Air Force Research Laboratory, US

A process for fabricating sub-cubic millimeter, fully autonomous micro-robots is presented. Details of the process flow and intial prototype structures are demonstrated. In addition, the design of an electrostatic actuator array for moving the robot [...]

MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer on an Airplane Fuselage

Krause J.S., White R.D., Moeller M.J., Gallman J.M., De Jong R., Tufts University, US

This paper describes a front venting MEMS pressure sensing array, fabricated through the MEMSCAP PolyMUMPS process. The microphone array will be used to analyze the turbulent boundary layer (TBL) of an airplane fuselage in wind [...]

Contact-free Handling of Metallic Submicron and Nanowires for Microelectronic Packaging Applications

Fiedler S., Zwanzig M., Jäger M.S., Böttcher M., Fraunhofer Institute for Reliability and Microintegration, DE

Individual submicron particles produced by non-lithographic techniques can be attractive for future microelectronic applications. Their touchless manipulation is a necessary prerequisite to use them, since they are too small to be handled via Pick&Place. We [...]

Micro to Nano – Scaling Packaging Technologies for Future Microsystems

Braun T., Becker K.-F., Bauer J., Hausel F., Pahl B., Wittler O., Mrossko R., Jung E., Ostmann A., Koch M., Bader V., Minge C., Aschenbrenner R., Reichl H., Technical University Berlin, DE

As the development of microelectronics is still driving towards further miniaturization new materials, processes and technologies are crucial for the realization of future cost effective microsystems and components. These future systems will not only consist [...]

Silicon on ceramics – a new concept for micro-nano-integration on wafer level

Fischer M., Bartsch de Torres H., Pawlowski B., Mach M., Gade R., Barth S., Hoffmann M., Müller J., Technische Universitat Ilmenau, DE

A new integration concept for silicon devices to ceramic substrates based on a new bonding technique between nano-scaled, modified Black Silicon and an adapted, unfired LTCC substrate is presented. The novel technique enables to combine [...]

Synthesis and Characterization of Templated Si-based Nanowires for Electrical Transport

Lee J-H., Carpenter M., Eisenbraun E., Xue Y., Geer R., University at Albany - State University of New York, US

Self-assembled Si nanowires (SiNWs) have been synthesized and characterized as a template for surface metal silicide formation to investigate confinement of electron transport at the nanowire surface. Silicon nanowires with diameters ranging from 5 to [...]

Phonon-assisted tunnelling mechanism of conduction in SnO2 and ZnO nanowires

Ohlckers P., Pipinys P., Vestfold University College, NO

Non-linear temperature-dependent current-voltages characteristics of SnO2 nanowires measured by Ma et al [2005 Solid State Commun 130 313] and single ZnO nanorods from {J.Y. Park et al., 2006 Nanotechnology 17 1255] are explained by the [...]

Magnetic Nanowires based Reciprocal & Non-reciprocal devices for Monolithic Microwave Integrated Circuits (MMIC)

Kuanr B.K., Marson R.L., Mishra S.R., University of Colorado at Colorado Springs, US

Transition metals and their alloys have magnetic properties suitable for electronic applications, especially in the microwave range, such as circulators, isolators and filters. Arrays of Ni nanowires were electrodeposited into alumina oxide templates with various [...]

Fabrication of Nanoparticle Embedded Polymer Nanorod by Template Based Electrodeposition

Kang S-W, Kang W-S, Nam G-H, Kim H-S, Kim J.H., Kim K-J, Kim H-S, Kim J.H., Kim K-J, Kang S-W, Kang W-S, Kim H-S, Kim J.H., Kim K-J, Ajou University, KR

Inorganic semiconductor materials in nano-dimension have drawn intense attention in recent years because of their size-tunable optoelectronic properties arising from the quantum confinement effect. These materials often require to be incorporated into other materials, often [...]