TechConnect Proceedings Papers
Electric Field Assisted Placement of Carbon Nanotubes Using Sacrificial Graphene Electrodes
Engel M., Farmer D., Tirapu Azpiroz J., Seo J.-W.T., Kang J., Avouris P., Hersam M.C., Krupke R., Steiner M., IBM Research, BR
Here we detail a complete process flow to overcome the challenge of placement of carbon nanotubes on solid surfaces, limiting "bottom-up", large-scale integration in semiconductor process technology. To date most bottom up placement strategies are [...]