Papers – Page 1054 – TechConnect Briefs

A 3D Mesh Generation Method for the Simulation of Semiconductor Processes and Devices

Lilja K., Moroz V., Wake D., Technology Modeling Associates, Inc., US

We present an extended quadtree-octree mesh generation method which is well suited for semiconductor process and device simulation. The method can handle complicated geometries and moving boundaries. In order to describe boundaries and trace boundary [...]

MEMS Design Optimization Using Coupled FEM and Electrical Circuit Simulation

Krassow H., Zabala M., Götz A., Cané C., Centro Nacional de Microelectronica, ES

The FEM (Finite Element Method) package ANSYS includin`, the CFD (Computational Fluid Dynamics) module FLOTRAN was coupled with the electrical network simulator HSPICE for the comprehensive design of microsystems. The coupling permits the simultaneous optimization [...]

Coupled Electro-Mechanical Simulation of Integrated Micro-Electro-Mechanical Systems

Lien H-P, Wiegele T.G., Bomholt L., Ruhl R., Integrated Systems Engineering AG, CH

Micro-electro-mechanical systems equipped with active devices (iMEMS) are commonly employed in sensor applications. In this paper, simulation of the mechanical and electrical properties of a deformable structure containing an integrated MOS sensor is described.

Coupling of FEM Programs for Simulation of Complex Systems

Krevet B., Kaboth W., Forschungszentrum Karlsruhe, DE

A method is presented which couples single task FEM programs, mesh generators and other utility programs to solve complex systems. By this method we are connecting the FEM programs with special Script Interpreter programs and [...]

Implications of Finite Time Stepping for Transient Sensor Models

Schubert M., González B., Fachhochschule Regensburg, DE

Modeling of sensor devices has to take into account not only variable voltaves and currents but also variable device parameters. This makes transient differentiation and integration more complex than for circuits with constant device characteristics. [...]

Nodal Analysis for MEMS Design Using SUGAR v0.5

Zhou N., Clark J.V., Pister K.S.J., UC-Berkeley, US

This paper presents the development of a simulation program (SUGAR) for planar MEMS devices. The approach is based on nodal analysis to solve coupled nonlinear differential equations. The current version SUGAR vO.5 can perform DC, [...]

A Mixed Rigid/Elastic Formulation for an Efficient Analysis of Electromechanical Systems

Ramaswamy D., Aluru N.R., White J.K., Massachusetts Institute of Technology, US

In this paper we describe both how to extract rigid bodies given an input file of elements, and how to efficiently construct and solve the rigid-elastic system of equations. Results are given to demonstrate that [...]

Energy-Based Solution Method for the Global Behavior of Diaphragms Under Pneumatic and Electrostatic Pressure

Francais O., Dufour I., LISiR-URA-CNRS, FR

In this paper, an approximate analytical solution is presented for the diaphragm's deflection based on energ minimization. through the use of a polynomial solution technique. Thanks to this method. we obtain not onlY the center [...]

Automated Solid Model Extraction for MEMS Visualization

DeVoe D.L., Green S.B., Jump J.M, University of Maryland, US

A software tool has been developed to enable the rapid generation of solid models for MEMS structures. The automated 3-dimensional model extraction (3DMX) software, together with a description of a MEMS process, is capable of [...]

Coupling of Length Scales and Atomistic Simulation of a MEMS Device

Rudd R.E., Broughton J.Q., SFA, Inc., US

We simulate the dynamic and temperature dependent behavior of two different Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this simulation accurately [...]