Coupled Electro-Mechanical Simulation of Integrated Micro-Electro-Mechanical Systems

Lien H-P, Wiegele T.G., Bomholt L., Ruhl R.
Integrated Systems Engineering AG, CH

Keywords: accelerometer, iMEMS, self-consistent electromechanical device simulation, TCAD

Micro-electro-mechanical systems equipped with active devices (iMEMS) are commonly employed in sensor applications. In this paper, simulation of the mechanical and electrical properties of a deformable structure containing an integrated MOS sensor is described.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 325 - 328
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3