Papers – Page 1024 – TechConnect Briefs

Torsional Ratcheting Actuating System

Barnes S.M., Miller S.L., Rodgers M.S., Bitsie F., Sandia National Laboratories, US

A new type of surface micromachined ratcheting actuation system has been developed at the Microelectronics Development Laboratory at Sandia National Laboratories. The actuator uses a torsional electrostatic comb drive that is coupled to an external [...]

Topics in Finite-Element Modeling of Piezoelectric MEMS Devices

von Preissig F.J., Kim E.S., University of Hawaii at Manoa, US

Techniques for modeling thin-piezoelectric MEMS devices using existing finite-element packages are examined. The emphasis is on non-resonant sensors and actuators, but most results are applicable to resonant devices and large structures as well. Characteristic features [...]

Design, Simulation and Fabrication of a Bridge Structure Microtransducer

Zanga M., Zurn S.M., Polla D.L., Nelson B.J., Robbins W.P., University of Minnesota, US

ANSYS simulation of a variety of microtransducers was performed. The results indicate that a bridge structure is an optimal design for a microtransducer. Simulation of a bridge structure PZT thin film microtransducer was verified by [...]

Modeling of Acoustic-Structural Coupling in a MEMS Hydrophone

Johnson H.T., Prevot L., Boston University, US

The coupling of acoustics and structural dynamics is of primary importance in the design of MEMS based microphones for use in liquid environments. A three-dimensional finite element study of acoustic-structural coupling is presented here for [...]

Vision-based Extraction of Geometry and Forces from Fabricated Micro Devices

Wang X., Ananthasuresh G.K., Ostrowski J.P., University of Pennsylvania, US

In the field of micro-electromechanical systems (MEMS), there are often times when a model derived directly from the microstructure of a fabricated device would be useful. In our research, the image of the structure is [...]

Finite-Element Modeling of 3C-SiC Membranes

DeAnna R.G., Mitchell J., Zorman C.A., Mehregany M., U.S. Army Research Laboratory, US

Finite-element modeling (FEM) of 3C-SiC thin-film membranes on Si substrates was used to determine the residual stress and center deflection with applied pressure. The anisotropic, three-dimensional model includes the entire 3C-SiC membrane and Si substrate [...]

Modelling of Processes of Photoacoustic Diagnostic with Piezoelectric Detection

Vertsanova O., Perlov I., Tsyganok B., National Technical University of Ukraine, UA

Authors developed the one-dimensional mathematical model of piezoelectric detection of photoacoustic effect in thermally thick and optically opaque sample with subsurface defect. The model is developed in view of the assumptions of ideally rigid connection [...]

Atomic Force Microscopic Visualization of Identical Site on Cell Surface with Different Probes

Ohta Y., Kobayashi T., Okamoto H., Okuda T., Toyo University, JP

For these several years Atomic Force Microscopy (AFM) has been widely used for visualization of biological samples with high resolution on nanometer scale. Whereas any biological information regarding specific reactions, such as immunological function, cannot [...]

Auto-Regressive Time Series Modeling of Stochastic Surfaces

Rao B.N.P., Murti V.S.R., Osmania University, IN

Roughness profiles of EDM surfaces were obtained from a perthometer and digitized through AUTO CAD. Fortran program was developed for fitting ARMA (n, n-1) models. A significant observation was that for the sinking electrode type. [...]

Modeling of High-speed Diamond Microswitch

Schmid P., Adamschik M., Ertl S., Kohn E., University of Ulm, DE

CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based [...]