Vision-based Extraction of Geometry and Forces from Fabricated Micro Devices

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In the field of micro-electromechanical systems (MEMS), there are often times when a model derived directly from the microstructure of a fabricated device would be useful. In our research, the image of the structure is taken by a CCD camera mounted on a microscope. This image is then processed to get the basic physical features on which a physical model can be established. This model can then be used for further analysis and simulation. We present some examples of generating both a CAD solid model and a macro-scale-manufactured prototype. In addition, we are studying the ability to use such visual measurements in order to determine deformations, strains, and forces present in a deformable structure under loading. This is done using images of the original and deformed structure to determine the deformation gradient, and from this solving an inverse problem to find the external loading. Our methodology and the numerical difficulties encountered in this approach will be discussed.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 257 - 260
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0