Veijola T.
Helsinki University of Technology, FI
Keywords: compact model, flow resistance, rare gas, surface roughness
The contribution of surface roughness is included in the flow resistance of rare gas flow channels. The statistical properties of the surface are taken into account in the model applying a novel approximation for the normal distribution function. The model assumes that the flow channel height varies statistically. Both transverse and longitudinal roughness in wide rectangular ducts and in circular channels are discussed. Final simple models are given in a form of effective viscosity that accounts for both the gas rarefaction and surface roughness.
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Published: February 23, 2003
Pages: 492 - 495
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9728422-1-7