stiction – TechConnect Briefs

Modeling the effect of the increase in the actuation voltage

Jamshidzade M., Cassles J., University of Barcelona, ES

In the past few years many reports have demonstrated the development of RF-MEMS switches considering the mechanical, electrical and chemical behaviors separately. However there are a few works which address the whole aspects of RF-MEMS [...]

Modeling the effect of the increase in the actuation voltage on the dynamic behavior of a RF MEMS switch

Jamshidzadeh M., Casals J., Assistant Professor, IR

Abstract—In the past few years many reports have demonstrated the development of RF-MEMS switches considering the mechanical, electrical and chemical behaviors separately. However there are a few works which address the whole aspects of RF-MEMS [...]

Analysis of the Liquid Mediated Friction during Alignment in NIL Process

Kang S-H, Park S.H., Lee W.I., Seoul National University, KR

When Nano-Imprint Lithography (NIL) process is adopted in the large area applications like display, the stiction phenomenon which is the adhesion or in-plane friction between mold and substrate to disturb fine alignment process can be [...]

Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)

Kobrin B., Chinn J., Ashurst R.W., Applied Microstructures, Inc., US

Development of new SAM coatings using a “sequential” vapor technique which can be deposited on almost any substrate material and withstand harsh environments is reported. Technical benefits for the improved surface modification method called Molecular [...]

Dynamic Simulation of MEMS Switches using Simulink

Combes D.J., Brunson K.M., John R., Bunyan T., QinetiQ Ltd, UK

A nodal model is implemented in Simulink and used to investigate the dynamics of electrostatically actuated MEMS switches. The model is based on reduced order 4DOF beam elements, with electrostatic forces based on simple parallel [...]

A Fluoro-ethoxysilane-Based Stiction-Free Release Process for Submicron Gap MEMS

Parvais B., Pallandre A., Jonas A.M., Raskin J-P, Université catholique de Louvain, BE

Nowadays, stiction remains one of the biggest reliability problems in the fabrication of micro-electromechanical systems (MEMS), especially when a small gap is used. To avoid the adhesion, a Self-Assembled Monolayer (SAM) can be coated. Main [...]

Nonlinear Micromachined Flexure for Stiction Reduction

Shim D-H, Cho J-W, Samsung Advanced Institute of Technology, KR

This paper reports the nonlinear micromachined flexure to reduce the stiction in MicroElectroMechanical Systems (MEMS). Good electrical contacts are essential in the applications like MEMS switches or relays. In this case high contact forces are [...]

Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force

Lam T., Darling R.B., University of Washington, US

A finite element model is combined with experimental data to extract the stiction force in MEMS cantilever beams. The model predicts cantilever behaviors both before and after snap-down has occurred. Experimental measurements of cantilevers have [...]