Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force

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A finite element model is combined with experimental data to extract the stiction force in MEMS cantilever beams. The model predicts cantilever behaviors both before and after snap-down has occurred. Experimental measurements of cantilevers have been performed to validate the model. With a reliable model and additional experimental data the stiction force between surfaces of MEMS devices can be extracted to predict device behavior or for process control.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 418 - 421
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4