sputtering – TechConnect Briefs

Structure and Mechanical Properties of Cr(Al)N/Al2O3 Nanocomposite Hard Coatings Fabricated by Differential Pumping Cosputtering

Kawasaaki M., Onishi I., Matsuda K., Nose M., Shiojiri M., JEOL USA Inc., US

Analytical electron microscopy revealed the structure of Cr(Al)N/Al2O3 nanocomposite coatings prepared on the Si substrate rotated at a speed as high as 12 rpm in a differential pumping cosputtering system(DPCS). The main layer that sputter-deposited [...]

Converting Dimensions: A Facile and High-Yield Route for Getting Sub-100 nm Silicon Nanowires

Lee S-H., Yonsei University, KR

For synthesizing uniform sub-100-nm Si nanowires (NWs), we introduce a metal-assisted chemical etching (MCE)-based facile and high-yield route, employing simple thermal annealing and vacuum deposition processes. Under rapid thermal annealing, an ultrathin Ag film on [...]

High Performance Sputtered PZT Film for MEMS applications

Hishinuma Y., Li Y., Birkmeyer J., Fujii T., Naono T., Arakawa T., FUJIFILM Dimatix, US

We have developed a method of forming PZT films on silicon substrates with a high piezoelectric coefficient using RF sputtering. Films have been formed on 6 inch wafers with thickness variation of less than +/-5% [...]

Thermal-managed sputtered micro machined gas chromatography columns for oilfield applications

Haudebourg R., Vial J., Thiébaut D., Sassiat P., Azzouz I., Danaie K., Bourlon B., Schlumberger, FR

Since the late 70s, new approaches have been proposed to replace conventional gas chromatograph apparatus by silicon based micro fabricated separation systems. The main challenge in miniaturized gas chromatography consists in the reproducible and collective [...]

Growth and investigations on Fe/MgO/Fe magnetic tunnel junctions fabricated by dual ion beam sputtering technique

Singh B., Gupta P., Chaudhary S., Pandya D.K., Kashyap S.C., Inidan Institute of Technology Delhi, IN

The experimental observation of Tunnel Magnetoresistance (TMR) in 1996 by Moodera’s group of MIT has triggered intensive efforts worldwide to fabricate and investigate the magnetoresistive junctions showing a TMR effect. While in past 3-4 years, [...]

Magnetic properties of Sputter deposited and magnetically annealed IrMn/CoFeB nanometric bilayers for exchange biased magnetic tunnel junctions

Fulara H., Raju M., Chaudhary S., Kashyap S.C., Pandya D.K., Inidan Institute of Technology Delhi, IN

The work relates to the exploring the means of controlling the coercivities of the ferromagnetic thin films in a Magnetic Tunnel Junction Stack. Exchange bias route is a very powerful route in achieving this task. [...]

High dielectric tunability of Ba0.6Sr0.4TiO3 thin film deposited by radio-frequency sputtering

Zuyong F., Nanyang Technological University, SG

Recently, the nonlinear dielectric property of BST thin films has been investigated for the development of frequency agile RF and highper formance microwave tunable devices, which include phase shifters, tunable filters, steerable antennas, varactors, and [...]