Reynold’s equation – TechConnect Briefs

A Method for Solving Arbitrary MEMS Perforation Problems with Edge and Rare Gas Effects

Veijola T., Helsinki University of Technology, FI

We present an accurate and fast method solving arbitrary perforation problems utilizing a solver for an extended modified Reynolds equation, the Local Impedance Reynolds (LIR) solver. The extension includes an additional term in the Reynolds [...]

Extending the Validity of Existing Squeezed-Film Damper Models with Elongations of Surface Dimensions

Veijola T., Pursula A., Helsinki University of Technology, FI

Border flow effects in squeezed-film dampers having a gap separation comparable with the surface dimensions are studied with 2D and 3D FEM simulations and with analytic models derived from the linearized Reynolds equation for small [...]

Compact Model for the Squeezed-Film Damping Including the Open Border Effects

Veijola T., Ruokonen K., Tittonen I., Helsinki University of Technology, FI

A numerical model for the squeezed-film damping between moving rigid, rectangular surfaces is presented. The emphasis is on the nontrivial boundary conditions for the flow, accounting for the finite acoustic impedance of the surrounding gas [...]

Squeeze Film Damping Effect on the Dynamic Response of a MEMS Torsion Mirror

Pan F., Kubby J., Peeters E., Tran A.T., Mukherjee S., XEROX, Xerox Wilson Research Center, US

Analytical formulae for the squeeze film darnping torque on a MEMS torsion mirror are derived based on series solutions to the linearized Reynold's equation. The derivation is carried out under the assumption that the angular [...]