Squeeze Film Damping Effect on the Dynamic Response of a MEMS Torsion Mirror

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Analytical formulae for the squeeze film darnping torque on a MEMS torsion mirror are derived based on series solutions to the linearized Reynold’s equation. The derivation is carried out under the assumption that the angular displacement of the mirror is small and is a harmonic function of time. This analytical squeeze film damping model is verified by numerically solving the nonlinear isothermal Reynold’s equation [1], and by conducting experimental measurements on a prototype device. Finally it is shown that although the analytical damping model is derived under the assumption of harmonic time response of the torsion mirror, it is still valid for the case of non-harmonic response, as long as the squeeze number is fairly small.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 474 - 479
Industry sector: Sensors, MEMS, Electronics
Topic: Micro & Bio Fluidics, Lab-on-Chip
ISBN: 0-96661-35-0-3