piezoelectric – Page 3 – TechConnect Briefs

A Novel Approach to Integrate Multiple Frequencies of Film Bulk Acoustic Resonators (FBAR) In A Single Chip

Huang Z., Suo Z., Wang L.-P., Shim D., Ma Q., Intel Corporation, US

Driven by fast growth of wireless communications, film bulk acoustic resonators (FBAR) have been extensively studied as RF filters. Recently, an integrated RF solution, which could include multiple mobile bands, WLAN, Bluetooth, GPS, and etc., [...]

Piezoelectric Microcantilevers of Nanoscale Thickness for Detection of Cells

Modi N., Lacy F., Southern University and A&M College, US

This research project explores the employment of piezoelectric material as the sensing element in microcantilever beams fabricated to function as resonant mass sensors. The cantilever beam would be a very thin double-bridged structure (50 nm) [...]

The Measurement of Ferroelectric Thin Films Using Piezo Force Microscopy

Cain M.G., Dunn S., Jones P., National Physical Laboratory, UK

The use of Atomic Force Microscopy to evaluated the surface properties of ferroelectric thin films is often associated with poor signal to noise ratio images and quantitative analysis is not possible. In this presentation the [...]

Numerical Modeling of a Piezoelectric Micropump

Schlipf R., Haghighi K., Lange R., Purdue University, US

An effective description and an accurate understanding of any pumping mechanism is critical, especially of the micro scale. With the existence of a comprehensive and adaptable model, accurate preproduction predictions of performance are realized. Optimal [...]

A New 3D Model of The Electro-Mechanical Response of Piezoelectric Structures

Elata D., Elka E., Abramovich H., Technion – Israel Institute of Technology, IL

The constitutive equations of multi-layered piezoelectric structures are derived in a new form. In this form, the electromechanical coupling is presented as an additional stiffness matrix. This matrix is a true property of the piezoelectric [...]

A Novel Structure for PZT-Based Piezoelectric Microphone

Zhao H.J., Ren T.L., Liu J.S., Liu L.T., Liu J.S., Liu L.T., Li Z.J., Liu J.S., Liu L.T., Tsinghua University, CN

Microphone is one of the most challenging and developing areas and markets in the field of microsensor technology. Piezoelectric microphones have the advantages of simple fabrication process and easy to be integrated into semiconductor devices [...]

Modeling, Simulation and Design of Piezoelectric Micro-Hydraulic Transducer Devices

Yaglioglu O., Su Y.H., Roberts D.C., Carretero J., Hagood N.W., Massachusetts Institute of Technology, US

This paper reports on modeling, simulation and design considerations for piezoelectric Micro-Hydraulic Transducer (MHT) systems, focusing on power generation applications. Since these devices are complex fluid and structural systems, comprehensive simulation tools are needed for [...]

Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer

Li G., Li T., Li Z., Li G., Li T., Li Z., Wang C., Hao Y., Li G., Li T., Li Z., Wu G., Peking University, CN

A monolithic piezoelectric triaxial accelerometer, using a highly symmetric quad-beam structure with a single seismic mass, has been developed. The structure of the accelerometer is analyzed in detail theoretically and numerically. Static and modal simulations [...]

Topics in Finite-Element Modeling of Piezoelectric MEMS Devices

von Preissig F.J., Kim E.S., University of Hawaii at Manoa, US

Techniques for modeling thin-piezoelectric MEMS devices using existing finite-element packages are examined. The emphasis is on non-resonant sensors and actuators, but most results are applicable to resonant devices and large structures as well. Characteristic features [...]

Analytical Modeling of Beam Behavior Under Different Actuations

Sarraute E., Dufour I., URA CNRS 1375, FR

The aim of this paper is to establish simple analytical equations of the beam deflection for different actuation methods (magnetic with current, magnetic with magnet, electrostatic and piezoelectric). The analytical formulae are obtained from the [...]