The Measurement of Ferroelectric Thin Films Using Piezo Force Microscopy

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The use of Atomic Force Microscopy to evaluated the surface properties of ferroelectric thin films is often associated with poor signal to noise ratio images and quantitative analysis is not possible. In this presentation the metrology associated with this technique is explored, and results comparing different materials types and surface cleanliness are described.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: March 7, 2004
Pages: 362 - 365
Industry sector: Advanced Materials & Manufacturing
Topicss: Advanced Materials for Engineering Applications, Coatings, Surfaces & Membranes
ISBN: 0-9728422-9-2