microfabrication – TechConnect Briefs

Apparent Tissue Modulus for Micro/Nano Pillar Arrays

Rajhi A.A., Coulter J.P., Jedlicka S.S., Lehigh univeristy, US

Polymeric culture platforms with micro/nano topographies have provided a powerful approach to modulate cell to substrate interactions. Cells respond to chemical and mechanical signals from surrounding microenvironments. While chemical signals have been well studied in [...]

Numerical and Experimental Investigation in Replicating a Micro-Featured Surface with the Injection Molding Process

Rajhi A., Jaafar I.H., Coulter J.P., Lehigh University, US

This paper describes current efforts to numerically and experimentally investigate micro and nanoscale features replication using the injection molding process. A silicon (Si) insert with micro–features is fabricated via photolithography followed by deep reactive ion [...]

Predicting the Response of an All-Elastomer In-Plane MEMS Tactile Sensor

Kalayeh K.M., Charalambides A., Charalambides P.G., Bergbreiter S., Charalambides A., Charalambides P.G., UMBC, US

This study is motivated by the need to develop highly sensitive tactile sensors for both robotic and bionic applications. The developments of advanced technologies in robotic grasping, motion of prosthetics, and robot assisted biomedical surgery [...]

Nanofabrication with Lanthanum Hexaboride (LaB6) for Nanoscale Vacuum Electronics

Mankin M.N., Pan T.S., Modern Electron, US

We present the first nano- and microfabrication of vacuum microelectronic components incorporating lanthanum hexaboride (LaB6), a refractory low work function material with high electron emissivity. We design novel fabrication processes which yield ultra-low fill factor [...]

Stretchable Gas and UV Sensors towards Wearable Electronics

Gutruf P., Walia S., Zeller E., Nili H., Sriram S., Bhaskaran M., RMIT University, AU

Electronics and sensors pervade all aspects of life, needing solutions to make them less obtrusive, which is where fully transparent electronics come into play. Our research focus has been to realise stretchable electronic devices with [...]

AFM/SNOM Cantilever Probe Serial Fabrication Process with Controlled Tip Nanoaperture

Tsigara A., Belier B., Maillard F., Falgayrettes P., Nativel E., Kribich R., Gall-Borrut P., Universite Paris Sud, FR

In this paper we present the microfabrication steps of sol gel and polymer (SU8) based cantilever probe systems using an alternative batch front face fabrication process. The probes are consisting of cantilevers with pyramidal nanoengineered [...]

3-axis Capacitive Low-Gravity MEMS Accelerometer with Zero Cross-Axis Sensitivity in a Commercial Process

Merdassi A., Chodavarapu V.P., McGill University, CA

We describe integrated multi-axis low-g MEMS accelerometer devices fabricated in a commercial SOIMUMPS process available from MEMSCAP. We employ capacitive transduction mechanism which provides high reliability, low temperature sensitivity, low drift, and low power consumption. [...]

Application of Micro-channel Cooling to the Local Thermal Management of Detectors Electronics for Particle Physics

Mapelli A., Petagna P., Pezous A., Renaud P., CERN, CH

Local thermal management through silicon microfluidic devices, already under study for possible application in future 3D architectures for high power computing [1,2], is also a good candidate for solving High Energy Physics related issues. It [...]

Fabrication and Characterization of HAR Microfluidic Device to Concentrate Microalgae

Singh V., Nguyen Q., Goettert J., Yemane D., Bargiel J., Lane C., Stephenson F., Louisiana State University, US

Algae are a promising candidate for large-scale production of biofuels, an important source of renewable energy [1]. A significant portion (20-40%) of the cost in the traditional processing comes from concentrating (dewatering) the algae from [...]

Direct Laser Writing of Microtunnels and Reservoirs on Nanocomposite Materials

Chen H., Liu X., Muthuraman H., Zou J., Wang J., Dai Q., Huo Q., University of Central Florida, US

Using the efficient photon—thermal energy conversion property of gold nanoparticles, a direct laser writing method has been developed for the fabrication of microstructures including microtunnels (see figure), holes, and reservoirs on nanoparticle/polymer composite thin films. [...]