MEMS – Page 30 – TechConnect Briefs

Modeling of Acoustic-Structural Coupling in a MEMS Hydrophone

Johnson H.T., Prevot L., Boston University, US

The coupling of acoustics and structural dynamics is of primary importance in the design of MEMS based microphones for use in liquid environments. A three-dimensional finite element study of acoustic-structural coupling is presented here for [...]

Finite-Element Modeling of 3C-SiC Membranes

DeAnna R.G., Mitchell J., Zorman C.A., Mehregany M., U.S. Army Research Laboratory, US

Finite-element modeling (FEM) of 3C-SiC thin-film membranes on Si substrates was used to determine the residual stress and center deflection with applied pressure. The anisotropic, three-dimensional model includes the entire 3C-SiC membrane and Si substrate [...]

Modelling of Processes of Photoacoustic Diagnostic with Piezoelectric Detection

Vertsanova O., Perlov I., Tsyganok B., National Technical University of Ukraine, UA

Authors developed the one-dimensional mathematical model of piezoelectric detection of photoacoustic effect in thermally thick and optically opaque sample with subsurface defect. The model is developed in view of the assumptions of ideally rigid connection [...]

Investigation of Cross-Coupling and Parasitic Effects in Microelectromechanical Devices on Device and System Level

Schrag G., Zelder G., Wachutka G., Münich University of Technology, DE

With progressing monolithic integration of entire micro-electromechanical systems on one chip fabricated by standard IC technology we have to cope with the problem that the operation of embedded transducer elements is considerably affected by cross-coupling [...]

Systematic Design and Optimization of Multi-Material, Multi-Degree-of-Freedom Micro Actuators

Sigmund O., Technical University of Denmark, DK

The paper reports an automated method for the synthesis of multi-material, multi-degree-of-freedom micro actuators. The method is based on topology optimization, an iterative computational scheme consisting of alternating finite element analyses, sensitivity analyses and optimal [...]

Automated Mask-Layout and Process Synthesis for MEMS

Ma L., Antonsson E.K., California Institute of Technology, US

This paper presents a method for automated mask-layout and process synthesis for MEMS. The synthesis problem is approached by use of a genetic algorithm. For a given desired device shape, and several fabrication process choices, [...]

A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor

Eaton W.P., Bitsie F., Smith J.H., Plummer D.W., Sandia National Laboratory, US

An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is presented. The solution is directly applicable to micromachined pressure sensors. The solution is compared to finite element analysis results and [...]

Modeling and Design Optimization of a CMOS Compatible MEMS

Latorre L., Bertrand Y., Hazard P., Pressecq F., Nouet P., LIRMM-CNRS, FR

Silicon etching at low temperature offers the possibility of manufacturing monolithic sensors with associated electronics. For a given technology, the so-called FSBM, we have established a set of relations to describe the mechanical behavior of [...]

Joule Heating Simulation of Poly-Silicon Thermal Micro-Actuators

Silversmith D.J., Reid J.R., Air Force Research Laboratory, US

Previous studies of surface micro-machined polycrystalline silicon MEMS thermal micro-actuators have shown that these simple devices can provide deflections on the order of 10 micrometers at CMOS compatible drive voltages. These thermo-mechanical devices operate by [...]

Characterization of DNA Flow through Microchannels

Shrewsbury P.J., Muller S.J., Liepmann D., University of California-Berkeley, US

Advances in silicon fabrication technology enable the reproduction of laboratory apparatus, and theoretically biochemical processes, on a microscale. The implementation of this technology, however, necessitates additional study as fluid dynamics change at this scale and, [...]