MEMS – Page 28 – TechConnect Briefs

Computer-Aided Kinematic Design of a Torsional Ratcheting Actuator

Sacks E., Barnes S.M., Purdue University, US

We have developed an interactive computer-aided design program that supports the mechanical design of devices fabricated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation [...]

Voxel-Based Heterogeneous Geometric Modeling for Surface Micromachined MEMS

Perrin A., Ananthakrishnan V., Gao F., Sarma R., Ananthasuresh G.K., University of Pennsylvania, 220 S. 33rd Street, US

A heterogeneous geometric modeler for microeletromechanical systmes (MEMS) is the focus of this paper. ON the basis of a comprehensive formalism describe in our earlier work, we present a 3-F implementation of the forward (from [...]

Robust Mask-Layout Synthesis for MEMS

Ma L., Antonsson E.K., California Institute of Technology, US

A method for automated mask-layout and process synthesis for MEMS using Genetic Algorithms was proposed by Ma and Antonsson [5]. For a given desired device shape, and several fabrication process choices, this synthesis method will [...]

Efficient Simulation of MEMS Using Element Stamps

Casinovi G., Georgia Institute of Technology, US

This paper describes an approach to MEMS simulation based on so-called element stamps, which are the building blocks of conventional circuit simulators. Stamps are derived from lumped-constant models of individual electromechanical devices, and built into [...]

A Design Approach for Robustness Improvement of Rate Gyroscopes

Acar C., Shkel A., University of California Irvine, US

This paper reports a design concept for robustness improvement of micromachined gyroscopes. The novelty of the approach is in expanding the design space of the device by increasing the degrees-of-freedom (DOF) of the system. The [...]

Scalable Macromodels for Microelectromechanical Systems

Srinivasan V., Jog A., Fair R.B., Duke University, US

A fully automatic macromodeling methodology to generate scalable reduced-order models for microelectromechanical systems is presented in this paper. Krylov subspace methods are used to generate reduced-order models from detailed higher-order models of the device under [...]

Full Wave Electromagnetic Analysis and Model Order Reduction for Complex Three Dimensional Structures

Balk I., He Y., IntelliSense Corporation, US

Progress in MEMS and packaging design has made significant changes in the requirements for modeling tools. In order to design a modern microdevice or interconnect system it is no longer sufficient to limit the analysis [...]

New Numerical Techniques and Tools in SUGAR for 3D MEMS Simulation

Bai Z., Bindel D., Clark J., Demmel J., Pister K., Zhou N., University of California Davis, US

SUGAR is a modified nodal analysis package for 3D MEMS simulations that owes its heritage and its name to the SPICE family of circuit simulation. SUGAR has undergone the stage of proof-of-concept which showed that [...]

Automatic Generation of Small-Signal Dynamic Macromodels from 3-D Simulation

Ramaswamy D., White J.K., Massachusetts Institute of Technology, US

Recent algorithmic developments have greatly accelerated 3-D simulation of micromachined devices, but simulation and optimization of systems which use those devices require much more easily evaluated, yet still accurate, macromodels. In this paper we focus [...]

GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS

Wilson N., Wang K., Yergeau D., Dutton R.W., Stanford University, US

This paper will detail the capabilities of a new geometric modeling tool, called Geodesic, which is being released in source code form to the general community. In addition to providing geometric operations to create geometry [...]