MEMS – Page 21 – TechConnect Briefs

Krylov-Subspace-Based Order Reduction Methods Applied to Generate Compact Thermo-Electric Models for MEMS

Bechtold T., Salimbahrami B., Rudnyi E.B., Lohmann B., Korvink J.G., IMTEK, University of Freiburg, DE

A high power dissipation density in todays miniature electronic/mechanical systems makes on-chip thermal management very important. In order to achieve quick to evaluate, yet accurate thermo-electric models, needed for the thermal management of microsystems, a [...]

System Model for MEMS based Laser Ultrasonic Receiver

Wilson W.C., NASA Langley Research Center, US

This paper investigates the system modeling of a MOEMS based Laser Ultrasonic receiver system. See Figure 1 for a block diagram of the system. The LUT receiver is comprised of a laser, and an optical [...]

A Systematic Approach to Macromodeling Complex MEMS Devices

Casinovi G., Georgia Tech, US

This paper describes a modeling methodology for arbitrary MEMS devices based on the concept of element stamps. Previously published work has shown that element stamps can be used profitably to build models of MEMS devices [...]

Dynamic Simulation of MEMS Switches using Simulink

Combes D.J., Brunson K.M., John R., Bunyan T., QinetiQ Ltd, UK

A nodal model is implemented in Simulink and used to investigate the dynamics of electrostatically actuated MEMS switches. The model is based on reduced order 4DOF beam elements, with electrostatic forces based on simple parallel [...]

Superharmonic Resonance of an Electrically Actuated Resonant Microsensor

Abdel-Rahman E.M., Nayfeh A.H., Virginia Polytechnic Institute and State University, US

We investigate the response of a microbeam-based resonant sensor to a superharmonic electric actuation. The model incorporates the nonlinearities associated with moderately large displacements and electric forces. The method of multiple scales is used to [...]

Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching

Bryzek J., Nasiri S., Flannery A., Kwon H., Novack M., Marx D., Sigari El, Chen E., Garate J., Transparent Networks, US

The demand for communication bandwidth together with advances in MEMS (micro-electro-mechanical systems) technology has spurred rapid development in the field of MOEMS (micro-optical-electrical mechanical systems). One exciting opportunity is in the area of photonic switching. [...]

Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors

Chen J.H., Weingar W., Azarov A., Giles R.C., Agere Systems, US

Recently proposed optical subsystems utilizing micro-electromechanical components are being developed for use in photonic crossconnects, optical add/drop multiplexers, and spectral equalizers. Common elements to these subsystems are electrostatically actuated micromechanical tilt mirrors that steer optical [...]

Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach

Cros F., Allen M.G., Lang J.H., Massachusetts Institute of Technology, US

As flux densities and frequencies are raised to increase the performance of magnetic micro-actuators, micro-motors/generators, and micro-inductors, eddy currents and magnetic saturation start to limit the performance of these devices. In this paper, we present [...]

MEMS Technologies for Communications

Nguyen C.T.-C., DARPA/MTO, US

Micromechanical (or umechanical) communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers. Possible MEMS-based receiver front-end architectures are [...]

RF-MEMS Voltage Tunable Capacitor using Electrostatic Forces

Lee J., Kim Y., Na D., Park S., Kyungpook National University, KR

In this paper, we have proposed a fabrication method of a RF-MEMS voltage tunable capacitor using Au-electroplating technique, which has one movable parallel plate with various structure of beams. We applied an electrostatic method and [...]