Superharmonic Resonance of an Electrically Actuated Resonant Microsensor

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We investigate the response of a microbeam-based resonant sensor to a superharmonic electric actuation. The model incorporates the nonlinearities associated with moderately large displacements and electric forces. The method of multiple scales is used to obtain two first-order nonlinear ordinary-differential equations that describe the modulation of the amplitude and phase of the response and its stability. We present typical resonator frequency-response and force-response curves. The curves demonstrate the existence of multivalued solutions. These curves consist of three branches which meet at two saddle-node bifurcation points. The results provide an analytical tool to predict the microsensor response to a superharmonic excitation, specifically the locations of sudden jumps and regions of hysteretic behavior, thereby enabling designers to safely use this signal as a measuring signal.

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Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Published: February 23, 2003
Pages: 440 - 443
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-1-7