MEMS modeling – TechConnect Briefs

Application of a Design Methodology Using a 2D Micro Scanner

Anac O., Basdogan I., Koc university, TR

Micro Electro Mechanical Systems (MEMS) are the new and emerging technology of the future and have many applications on different disciplines like biomedical, imaging technology, biology etc. Characterization of motion and vibrations of such systems [...]

Extraction of Damping Coefficients of Comb Drive by Partitioning

Khaliq A., Liu X., Nohria R., Su Y., Varahramyan K., Louisiana Tech University, US

Accurate prediction of the dynamic behavior of comb-driven MEMS device is important to optimize the structure design. Viscous damping in the surrounding air determines the dynamic response of movable structures close to resonance. Viscose damping [...]

Effects of Etch Holes in Microelectromechanical Resonators

Yan J., Seshia A.A., University of Cambridge, UK

Micromachining processes such as surface machining of polysilicon microstructures or SOI-based processes often require etch holes to be created in the structural layer for purposes of releasing the mechanical structures. The present work examines the [...]

A Method for Solving Arbitrary MEMS Perforation Problems with Edge and Rare Gas Effects

Veijola T., Helsinki University of Technology, FI

We present an accurate and fast method solving arbitrary perforation problems utilizing a solver for an extended modified Reynolds equation, the Local Impedance Reynolds (LIR) solver. The extension includes an additional term in the Reynolds [...]

On the Air Damping of Micro-Resonators in the Free-Molecular Region

Hutcherson S., Ye W., Georgia Institute of Technology, US

Predicting air damping on micromachined mechanical resonators is crucial in the design of high-performance filters used in wireless communication systems. In the past, most of the work focused on devices with minimum feature size on [...]

A Full-System Dynamic Model for Complex MEMS Structures

Rocha L.A., Cretu E., Wollfenbuttel R.F., Delft University of Technology, NL

For full characterization of a surface micromachined MEMS device, where the thickness of the moving layer is just a few times the gap size, the modeling has to take large-signal behavior and end effects into [...]

Practical Techniques for Measuring MEMS Properties

Clark J.V., Garmire D., Last M., Demmel J., Govindjee S., Berkeley Sensor and Actuator Center, US

We describe simple test structures and practical analysis techniques to measure properties of MEMS devices. Our structures are designed to test many quantities using simple electric probes in a minimal chip area. We analyze differences [...]

Microelectromechanical Systems (MEMS) Design and Design Automation Research Projects at Duke University

Dewey A., Fair R.B., Duke University, US

This paper presents an overview of microelectromechanical systems (MEMS) research being conducted at Duke University. The Duke University MEMS research program encompasses initiatives in both application design and design automation. These two areas serve synergistic [...]