finite element method – Page 2

Transient Filling Flow into Microchannels Considering Surface Tension

Kim D.S., Lee K-C, Lee S.S., Kwon T.H., Lee K-C, Lee S.S., Pohang University of Science and Technology, KR

In this paper, we investigated, both experimentally and numerically, transient “filling” flow into microchannels, which differs from completely “filled” flow in micro-channels. An experimental flow visualization system was devised to observe the characteristics of microchannel [...]

Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force

Lam T., Darling R.B., University of Washington, US

A finite element model is combined with experimental data to extract the stiction force in MEMS cantilever beams. The model predicts cantilever behaviors both before and after snap-down has occurred. Experimental measurements of cantilevers have [...]

Finite Element Analysis in the Development of MEMS-based Compound Grating (MCG)

Yao Y., Castracane J., Xu B., Olson S., Eisden J.V., University at Albany-SUNY, US

This paper presents the development of the 1 mm ruled MEMS-based Compound Grating (MCG) in which the structural material of the rulings is SiO2 coated with Cr/Au as the top electrode. The MEMS simulation package [...]

Investigation into the Standardization of Micromechanical Components and their Simulation and Computation Using FEM — Case Study of Diaphragms

Weiss E., Welp E.G., Witzel U., Wieck A., Schmidt E., Ruhr University Bochum, DE

Although certain components (such as diaphragms or beams) are used recurrently in micromechanics, the degree of standardization of components that is familiear in classic mechanical engineering is still to a great extent unknown in this [...]

Simulation of Shape Memory Devices with Coupled Finite Element Programs

Krevet B., Kohl M., Forschungszentrum Karlsruhe, DE

This paper presents thermal and mechanical calculations on micro devices driven by electrical heating of a shape memory alloy (SMA). For simulation a program packages has been developed to allow coupling of single task Finite [...]

Structural Design of Micro Electrostatic Actuator for Optical Memory Using Design Windows Searching Method

Ishihara D., Jeong M.J., Yoshimura S., Yagawa G., Kim Y.J., University of Tokyo, JP

For satisfactory design of micromachines, this paper describes a search method for a multi-dimensional design window (DW), which is defined as an area of satisfactory solutions in a feasible design parameter space. The method consists [...]

Moment-based Analysis of Mechanical Effects on Trench-Hall Devices

Taschini S., Korvink J.G., Baltes H., ETH Zürich, CH

This paper presents a novel method for the assessment of mechanical effects on trench-Hall devices based on a moment expansion combined with two-dimensional finite-element discretization. Analogously to plate theories, a truncated moment expansion of the [...]

Modeling and Simulation of a Permanent Magnet Array in Elliptical Configurations

Lee S.J., Jiles D.C., Iowa State University, US

Permanent magnet arrays have advantages for magnetic field generation over the traditional current based magnetic flux sources, such as electromagnets, in that they do not require a power supply and cooling system. Magnetic flux density [...]

Hierarchical Simulation for Microelectrofluidic System Performance Analysis

Zhang T., Dewey A., Duke University, US

With the sophisticated development of microelectro fluiidic devices and systems, system performance analysis is a key for system optimization and system re-design. Due to the increasing complexity and natural characteristics of microsystems, system performance is [...]

Inductance Calculation in Interconnect Structures

Harlander C., Sabelka R., Selberherr S., Technical University of Vienna, AT

We present a package based fnite elements for two and three-dimensional analyses of interconnect structures. Two preprocessors allow a layer-based input of the simulation geometry and the specification of the boundary conditions. Additionally, a third [...]