FEM – Page 3 – TechConnect Briefs

Hierarchical Simulation for Microelectrofluidic System Performance Analysis

Zhang T., Dewey A., Duke University, US

With the sophisticated development of microelectro fluiidic devices and systems, system performance analysis is a key for system optimization and system re-design. Due to the increasing complexity and natural characteristics of microsystems, system performance is [...]

Influence of Element Size on the Precision and Required Computational Effort for 3D FEM Interconnect Capacitance Simulations of ULSI DRAM Cells

Hieke A., Infineon Technologies Corporation, US

A fundamental proble of all FEM capacitance computations in MEMS and ULSI is to determine proper mesh size for the elements representing the considered model. In particular, opticaml mesh size selection is crucial for large [...]

Topics in Finite-Element Modeling of Piezoelectric MEMS Devices

von Preissig F.J., Kim E.S., University of Hawaii at Manoa, US

Techniques for modeling thin-piezoelectric MEMS devices using existing finite-element packages are examined. The emphasis is on non-resonant sensors and actuators, but most results are applicable to resonant devices and large structures as well. Characteristic features [...]

Finite-Element Modeling of 3C-SiC Membranes

DeAnna R.G., Mitchell J., Zorman C.A., Mehregany M., U.S. Army Research Laboratory, US

Finite-element modeling (FEM) of 3C-SiC thin-film membranes on Si substrates was used to determine the residual stress and center deflection with applied pressure. The anisotropic, three-dimensional model includes the entire 3C-SiC membrane and Si substrate [...]

Electromechanical Analysis of Micromechanical SOI-Fabricated RF Resonators

Lamminmäki T., Ruokonen K., Tittonen I., Mattila T., Jaakkola O., Oja A., Seppä H., Seppälä P., Seppälä P., Kiihamäki J., Helsinki University of Technology, FI

In this paper, finite element method (FEM) simulations are used to model mechanical properties of MEMS resonators. Using a static displacement analysis the effective spring constant and mass are calculated. Non-linearity of the mechanical restoring [...]

Coupled Package-Device Modeling for MEMS

Bart S.F., Zhang S., Rabinovich V.L., Cunningham S., Microcosm Technologies, Inc., US

Microelectromechanical Systems (MEMS), by their nature as sensors and actuators, require application specific packaging. The package is the near environment of the MEMS device and hence has a direct effect on its thermal behavior, on [...]

Modeling and Validation of Flow-Structure Interactions in Passive Micro Valves

Oosterbroek R.E., Schlautmann S., Berenschot J.W., Lammerink T.S.J., van den Berg A., Elwenspoek M.C., University of TWente, NL

This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained [...]

Finite Element Approach for Reactive Microfluidic Devices

Hsing I-M, Srinivasan R., Jensen K.F., Schmidt M.A., Hong Kong University of Science and Technology, HK

We report a finite element method (FEM) based model for simulating microfluidic devices with chemical reactions. The simulation approach incorporates a general mesh generation procedure, which allows us to explore different application-oriented designs of microfluidic [...]

FELLINI-A CAD Tool for the Design of Microsystems

Lang M., Glesner M., Darmstadt University of Technology, DE

This paper reports of the CAD-tool FELLINI, which supports the design of microsysfems on the lower levels of abstraction. FELLINI provides a bidirectional interface between the structural and the layout level. A Layout-to-FEM converter as [...]

An Environment for MEMS Design and Verification

Bart S.F., Swart N.R., Mariappan M., Zaman M.H., Gilbert J.R., Microcosm Technologies, Inc., US

A comprehensive CAD software environment is presented for MEMS/MST design. It includes MEMS mechanical schematic entry, parameterized cell layout generation, automatic lumped parameter macro-model generation, and LVS style error checking. These tools allow for flexible [...]