Characterisation of Electrical Fields of Buried Interdigitated Nanoscale Ti-Electrode Arrays by a Novel Atomic Force Microscopy Measurement Procedure and Their Fabrication by FIB Milling

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The fabrication and characterisation of interdigitated titanium nanoelectrode arrays with 500nm and 50nm width and spacing is described in this work. The electrical-field above the fabricated 500nm electrodes can be sensed by means of a [...]