e-beam lithography – TechConnect Briefs

Fabrication of Nanoporous Ultrananocrystalline Diamond Membranes

Makarova O.V., Divan R., Moldovan N., Tang C.-M., Creatv MicroTech, Inc, US

Nanoporous membranes engineered to mimic natural filtration systems can be used in smart implantable drug delivery systems, bioartificial organs, and other novel nano-enabled medical devices. The ultrananocrystalline diamond (UNCD) porous membranes will open new opportunities [...]

Germanium antimony sulphide nano wires fabricated by chemical vapour deposition and e-beam lithography

Huang C-C, Tai C-Y, Liu C-J, Simpson R.E., Knight K., Hewak D.W., University of Southampton, UK

Germanium antimony sulphide (Ge-Sb-S) amorphous thin films and nano wires have been directly deposited and patterned on SiO2-on-silicon substrates by means of chemical vapour deposition, e-beam lithography and dry etching. The Ge-Sb-S thin films were [...]

Responsive Hydrogels as Model Materials to Study the Deformation Behavior of Patterned Polymer Nanostructures

Tirumala V.R., Stafford C.M., Huang R., Lin E.K., Ocola L.E., National Institute of Standards and Technology, US

The mechanical stability of polymer nanolines is crucial to the success of semiconductor device fabrication. Recent experimental and modeling studies have focused on the influence of processing conditions on the stability of densely patterned lines. [...]

Resist Mask Designs for Quantum Dot Transistor Using E-Beam Nanolithography

Hashim U., Sutikno S., Jamal Z.A.Z., Northern Malaysia University College of Engineering (KUKUM), MY

Quantum dot single electron transistor (QD SET) can be fabricated using e-beam nanolithography (EBL) and then continued by combination process of pattern dependent oxidation (PADOX) and high density plasma etching. EBL was used to pattern [...]

Binary Chemical Nanopatterns: Fabrication and Use as Templates for Electrostatic Self-Assembly

Baralia G., Jonas A.M., Nicol E., Moussa A., Nysten B., Pallandre A., Université catholique de Louvain, BE

We report on surface-directed macromolecular self-assembly at the nanoscale, starting from 2D templates produced by combining electron beam nanolithography with surface chemistry. As assembly process, we concentrate on electrostatic self-assembly, which allows to grow functional [...]