Optimised Piezoelectric PZT Thin Film Production on 8” Silicon Wafers for Micromechanical Applications
Kaden D., Gu-Stoppel S., Quenzer H.-J., Kaltenbacher D., Wagner B., Dudde R., Fraunhofer Inst. Silicon Technology, DE
Piezoelectric materials are of great interest for powerful actuation in MEMS devices. Due to its large electromechanical coupling coefficient Lead Zirconate Titanate (PZT) is one of the most favourable materials for realisation of fast and [...]