accelerometer – Page 2 – TechConnect Briefs

Macromodel of Intelligent Sensor Structure with Accelometer

Husak M., Jakovenko J., Kulha P., Novak J., Janicek V., Czech Technical University in Prague, CZ

The paper describes conceptual approach to the design of a tilt structure determined for integration on a chip. An accelerometer for measurement of inclination in x and y axes is used as a sensor. There [...]

Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer

Xie H., Fedder G.K., Pan Z., Frey W., University of Florida, US

This paper reports a novel single structure, three-axis sensing accelerometer based on post-CMOS process. The resultant device incorporates both thin-film structures and bulk Si structures to achieve three-axis acceleration sensing without extra front-side lithography, or [...]

Modeling and Simulation of A Surface Micromachined Triaxial Accelerometer

Jiang L., Carr W.N., New Jersey Institute of Technology, US

We present the modeling and simulation results in designing a surface micromachined, capacitive triaxial accelerometer. Electrical FEA simulations calculate the nominal values of the sensing capacitors and compared with parallel-plate analytical model. The mechanical static [...]

Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer

Xie H., Fedder G.K., Pan Z., Frey W., University of Florida, US

This paper reports a novel single structure, three-axis sensing accelerometer based on post-CMOS process. The resultant device incorporates both thin-film structures and bulk Si structures to achieve three-axis acceleration sensing without extra front-side lithography, or [...]

Parameter Extraction for Surface Micromachining Using Eelectrical Characterization of Sensors

Maute M., Kimmerle S., Franz J., Hauer J., Schubert D., Krauss H.-R., Kern D.P., Robert Bosch GmbH, DE

This paper presents a novel methodology for the extraction of process dependent geometrical parameters of surface micromachined sensors. This approach is based on the electrical measurement of static capacitance-voltage characteristics of the sensor element on [...]

Closed Loop Micromachined Inertial Sensors with Higher Order SD-Modulators

Kraft M., Redman-White W., Mokhtari M.E., University of Southampton, UK

Micromachined inertial sensors are often incorporated in closed loop force feedback structures; a particularly advantageous approach is based upon the inclusion of the sensing element in a sigma-delta modulator (SDM) type control structure. The order [...]

Analytical Modelling for Accelerometers with Electrically Tunable Sensitivity

Cretu E., Bartek M., Wolffenbuttel R.F., Delft University of Technology, NL

Results of the analysis and modelling of a pendulum type of accelerometer in an electrostatic field are presented. A common-mode voltage is used to yield an electrostatic positive feedback that amplifies the mechanical sensitivity. The [...]

A Neural Network Approach for the Identification of Micromachined Accelerometers

Gaura E.I., Steele N., Rider R.J., Coventry University, UK

The paper presents the identification procedure for a nonlinear accelerometer using a neural network. Simulation results obtained in SPICE and Matlab show good agreement between the behaviour of the sensor over its entire working range [...]

Micromachined Accelerometer Design, Modeling and Validation

Davies B.R., Bateman V.I., Brown F.A., Montague S., Murray J.R., Rey D., Smith J.H., Sandia National Laboratories, US

Micromachining technologies enable the development of low-cosr devices capable of sensing motion in a reliable and accurate manner. The development of various surface micromachined accelerometers and gyroscopes to sense motion is an ongoing activity at [...]

Modeling and Characterization of an Integrated FET Accelerometer

Kniffin M.L., Wiegele T.G., Masquelier M.P., Fu H., Whitfield J., Motorola, Inc., US

The GFET accelerometer is an integrated inertial sensor based on a movable-gate field effect transistor. The complexity of the transduction principle and the tight tolerances associated with its manufacture necessitated a large range of simulation [...]