A New Method to Fin-width Line Edge Roughness Effect Simulation of FinFET Performance
Zhu Y., Zhao W., Wang W., Wu W., Feng Z., He J., He P., He J., He P., Song L., Peking University Shenzhen SOC Key Laboratory, CN
This paper developed a full three-dimensional (3-D) statistical simulation method to investigate Fin-width Line Edge Roughness (LER) effect on the FinFETs performance. The line edge roughness is introduced by Matlab program, and then the intrinsic [...]