Robert Bosch GmbH – TechConnect Briefs

Modeling and Simulation for MEMS Design, Industrial Requirements

Neul R., Robert Bosch GmbH, DE

The development process of today’s products is dominated by demands like ‘product performance’, ‘quality, ‘time to market’, ‘development cost’, ‘development risk’ etc., while the products’ complexity is increasing. Design methods for MEMS devices are discussed, [...]

Modeling and Simulation for MEMS Design, Industrial Requirements

Neul R., Robert Bosch GmbH, DE

The development process of today’s products is dominated by demands like ‘product performance’, ‘quality, ‘time to market’, ‘development cost’, ‘development risk’ etc., while the products’ complexity is increasing. Design methods for MEMS devices are discussed, [...]

Parameter Extraction for Surface Micromachining Using Eelectrical Characterization of Sensors

Maute M., Kimmerle S., Franz J., Hauer J., Schubert D., Krauss H.-R., Kern D.P., Robert Bosch GmbH, DE

This paper presents a novel methodology for the extraction of process dependent geometrical parameters of surface micromachined sensors. This approach is based on the electrical measurement of static capacitance-voltage characteristics of the sensor element on [...]

Simulation of Nonideal Behaviour in Integrated Piezoresistive Silicon Pressure Sensors

Romes W., Muchow J., Finkbeiner S., Franz J., Schatz O., Trah H-P., Robert Bosch GmbH, DE

The signal formation in piezoresistive silicon pressure sensors has been studied for many years and is very well understood meanwhile. Nevertheless there are higher order effects of nonideal behaviour such as nonlinearities and hys-teresis effects [...]

Modeling of Electrostatic MEMS Components

Lorenz G., Neul R., Dickmann S., Robert Bosch GmbH, DE

This paper describes an analytical approach for the network-type modeling of pull-in comb drives based on a mathematical field description using conformal mapping methods. The model was coded in MAST R for the SABER R [...]

Network-Type Modeling of Micromachined Sensor Systems

Lorenz G., Neul R., Robert Bosch GmbH, DE

This paper describes the development of networktype models for the simulation of micromechanical components such as spatial beams and masses. The models were coded in MASTÆ for the SABERÆ simulator and their accuracy was compared [...]