Modeling of Electrostatic MEMS Components

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This paper describes an analytical approach for the network-type modeling of pull-in comb drives based on a mathematical field description using conformal mapping methods. The model was coded in MAST R for the SABER R simulator and its accuracy was compared to FDM and boundary element simulations using MAFIA and MEMCAD. This approach leads to a library of network-type multi domain component models for the system simulation of MEMS, providing nearly the accuracy of field-solving codes at network-type simulation speed.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 128 - 131
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6