Quantitative Synchrotron Grazing Incidence X-ray Scattering and Reflectivity Analysis of Nano-structures and Patterns Supported with Substrates
Ree M., Yoon J., Heo K., Jin K.S., Jin S., Jin K.S., Jin S., Lee B., Park I., Park Y.H., Choi S.C., Kim G., Kim H., Kim J-S, Kim J., Kim K.W., Kim G., Kim H., Kim J-S, Kim J., Kim K.W., Oh W., Park I., Park Y.H., Hwang Y., Kim G., Kim H., Kim J-S, Kim J., Kim K.W., Kim G., Kim H., Kim J-S, Kim J., Kim K.W., Kim G., Kim H., Kim J-S, Kim J., Kim K.W., Chang T., Pohang University of Science & Technology, KR
Single-layer, multi-layer, and patterned nanostructures were fabricated with aids of substrates from various material systems (polymers, diblock copolymers, polymer blends, alumina precursors, silane precursor, etc.) using wet spin-coating and subsequent dry and thermal process, chemical [...]