US – Page 477 – TechConnect Briefs

DOPDEES/PMM: A System for Portable Model Description

Gencer A.H., Dunham S.T., Boston University, US

We have developed a multi-purpose partial differential equation solver, DOPDEES, which is capable of solving initial value problems in one spatial dimension using a finite differences method. The system of partial fferential equations is specified [...]

Multi-Mode Sensitive Layout Synthesis of Microresonators

Iyer S., Mukherjee T., Fedder G.K., Carnegie Mellon University, US

Microresonator layouts are synthesized such that their preferred mode of oscillation is well-separated from the higher order in-plane and out-of-plane modes. Building on our previous work, we have incorporated models for four out-of-plane modes. All [...]

An Environment for MEMS Design and Verification

Bart S.F., Swart N.R., Mariappan M., Zaman M.H., Gilbert J.R., Microcosm Technologies, Inc., US

A comprehensive CAD software environment is presented for MEMS/MST design. It includes MEMS mechanical schematic entry, parameterized cell layout generation, automatic lumped parameter macro-model generation, and LVS style error checking. These tools allow for flexible [...]

Autonomous Agents Design for Digital Network Maximization in Joint C4I System

DaBose M.W., Luqi L., Naval Postgraduate School, US

The advent of the computer age has brought about an ever increasing demand to transfer exponentially increasing amounts of information, and the as ciated problems of information sharing. The focus of this pa is to [...]

Simulating 3-Dimensional Deep X-ray Lithography Using the CXrL Toolset

Aigeldinger G., Craft B., Menz W., Louisiana State University, US

Experimental evaluation of the dose distribution resulting from 3-dimensional deep x-ray lithography is often impractical. Computer modeling is a valuable tool for simulating this system. Preliminary simulations of 3-dimensional, deep, xray lithography exposures have been [...]

A 3D Mesh Generation Method for the Simulation of Semiconductor Processes and Devices

Lilja K., Moroz V., Wake D., Technology Modeling Associates, Inc., US

We present an extended quadtree-octree mesh generation method which is well suited for semiconductor process and device simulation. The method can handle complicated geometries and moving boundaries. In order to describe boundaries and trace boundary [...]

Nodal Analysis for MEMS Design Using SUGAR v0.5

Zhou N., Clark J.V., Pister K.S.J., UC-Berkeley, US

This paper presents the development of a simulation program (SUGAR) for planar MEMS devices. The approach is based on nodal analysis to solve coupled nonlinear differential equations. The current version SUGAR vO.5 can perform DC, [...]

A Mixed Rigid/Elastic Formulation for an Efficient Analysis of Electromechanical Systems

Ramaswamy D., Aluru N.R., White J.K., Massachusetts Institute of Technology, US

In this paper we describe both how to extract rigid bodies given an input file of elements, and how to efficiently construct and solve the rigid-elastic system of equations. Results are given to demonstrate that [...]

Automated Solid Model Extraction for MEMS Visualization

DeVoe D.L., Green S.B., Jump J.M, University of Maryland, US

A software tool has been developed to enable the rapid generation of solid models for MEMS structures. The automated 3-dimensional model extraction (3DMX) software, together with a description of a MEMS process, is capable of [...]

Coupling of Length Scales and Atomistic Simulation of a MEMS Device

Rudd R.E., Broughton J.Q., SFA, Inc., US

We simulate the dynamic and temperature dependent behavior of two different Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this simulation accurately [...]