US – Page 420 – TechConnect Briefs

Dynamically Amplified Rate Integrating Gyroscopes

Painter C., Shkel A., University of California Irvine, US

The paper presents the design, modeling, simulation, and initial characterization of a novel MEMS vibratory rate integrating gyroscope, which uses a dual mass architecture. In contrast to conventional micromachined vibratory gyroscopes which measure angular rate, [...]

High-fidelity MEMS Switch Model

Park K.C., Park Y.H., Miyazaki Y., Park K.C., Park Y.H., University of Colorado at Boulder, US

MEMS switches have used in a wide variety of microwave applications because of low loss and small measurable signal distortion since the switching action is accomplished by mechanical contact. While various microswitches are currently being [...]

Coupled Substrate-resonator-electrostatic Simulation and Validation fo High-Q MEMS Resonator Performance

Park K.C., Park Y.H., Park K.C., Park Y.H., University of Colorado at Boulder, US

Vibration energy transmission from MEMS resonator through anchor to substrate, viz., anchor loss, is examined by utilizing the coupled substrate-resonator-electrostatic numerical model. The resonator is electrostatically excited beam-type structure anchored at both ends onto multi-layered [...]

Operation and Testing of a Micro Heat Engine

Whalen S., Richards C., Richards R., Bahr D., Richards C., Richards R., Washington State University, US

The development and testing of a micro heat engine is presented. For the first time the production of electrical power by a dynamic micro heat engine is demonstrated. The prototype micro heat engine is an [...]

Optimization of Thermally Actuated Bimorph Cantilevers for Maximum Deflection

Peng W., Xiao Z., Farmer K.R., New Jersey Institute of Technology, US

Theoretical analysis of thermally actuated bimorph cantilevers is presented to find the optimum condition for maximum deflection. The relations between material properties, dimensions and deflections are discussed in detail to understand the mechanism. Optimum condition [...]

Mechanical Damping due to Interface Motion in Micro-Resonators

Pawaskar D.N., Phillips R., California Institute of Technology, US

Mechanical damping strongly influences the sensitivity and resolution of nano-sensors and actuators. In this paper, we have investigated one of the key intrinsic mechanisms responsible for dissipation of vibrational energy in beams composed of a [...]

Modeling and Optimal Design of High Sensitivity Piezoresistive Microcantilevers for Biosensing Applications

Yang M., Zhang X., Ozkan C.S., University of California Riverside, US

We discuss the mechanical design and optimization of piezoresistive microcantilevers for use in detecting changes in surface stress upon analyte-receptor binding. Conventional microcantilevers are used along with an optical detection system in many commercially available [...]

Analysis of Temperature Effect on Diaphragm Resonant Sensors

Faris W., Virginia Polytechnic and State Univeristy, US

Resonant senosrs and microsensors are one of the most common used sensors in industry. The applications ranges from fuid, pressure to chemical sensing. Temperature effect on the performance of such devices is of importance to [...]

Modeling and Simulation of A Surface Micromachined Triaxial Accelerometer

Jiang L., Carr W.N., New Jersey Institute of Technology, US

We present the modeling and simulation results in designing a surface micromachined, capacitive triaxial accelerometer. Electrical FEA simulations calculate the nominal values of the sensing capacitors and compared with parallel-plate analytical model. The mechanical static [...]

The Design of a Biaxial Micro Mirror

Zhang X., Yao Y., Wang G., Huang L., Han N., Intpax Inc., US

Insights are developed for the design of an electrostatic actuated biaxial micro optical mirror. The relation among the pull-in angle, lift space, electrode size and applied voltage are derived and the simplification is achieved. The [...]