DE – Page 34 – TechConnect Briefs

Simulation of Electrically-Excited Flows in Microchannels for Mixing Application

Meisel I., Ehrhard P., Forschungszentrum Karlsruhe GmbH, DE

In the present paper we propose a method for improved mixing in microchannels. The basic idea is to excite a secondary vortex flow around an obstacle within the micromixer by applying an external oscillatory electrical [...]

Simulation of Hydrodynamic Dispersion in Gas/Liquid Microreactors

Hardt S., Doffing F., Pennemann H., Institut für Mikrotechnik Mainz GmbH, DE

Dispersion and spreading of concentration signals in gas/liquid microreactors is studied with methods of computational fluid dynamics (CFD). It is shown that conventional reactor designs exhibit a broad residence-time distribution due to convective signal dispersion. [...]

Modeling and Simulation for MEMS Design, Industrial Requirements

Neul R., Robert Bosch GmbH, DE

The development process of today’s products is dominated by demands like ‘product performance’, ‘quality, ‘time to market’, ‘development cost’, ‘development risk’ etc., while the products’ complexity is increasing. Design methods for MEMS devices are discussed, [...]

A Data Model for the Representation of Fabrication Dependencies Concerning Micromechanical Devices

Hansen U., Büttgenbach S., Technical University of Braunschweig, DE

Conventionally the design of a product is conducted paying only little attention to the subsequent manufacturing. Regarding micromechanical devices this is not practicable, since the design choices taken are highly dependent on the technology used [...]

Improved Modified Local Density Approximation for Modeling of Size Quantization in NMOSFETs

Jungemann C., Nguyen C.D., Decker S., Meinerzhagen B., Universitat Bremen, DE

An improved version of the modified local density approximation is presented which correctly describes the impact of size quantization on the threshold voltage and capacitance of state-of-the-art NMOSFETs with very thin oxides for temperatures from [...]

Parameter Extraction for Surface Micromachining Using Eelectrical Characterization of Sensors

Maute M., Kimmerle S., Franz J., Hauer J., Schubert D., Krauss H.-R., Kern D.P., Robert Bosch GmbH, DE

This paper presents a novel methodology for the extraction of process dependent geometrical parameters of surface micromachined sensors. This approach is based on the electrical measurement of static capacitance-voltage characteristics of the sensor element on [...]

Thermal Modeling of a Surface-micromachined Linear Thermomechanical Actuator

Lott C.D., McLain T.W., Harb J.N., Howell L.L., Brigham Young University, DE

The thermal behavior of a thermomechanical in-plane microactuator is modeled using a finite-difference approach. Steady-state temperature profiles from the model are presented for a microactuator operating in air and a vacuum. The model is validated [...]

Investigation into the Standardization of Micromechanical Components and their Simulation and Computation Using FEM — Case Study of Diaphragms

Weiss E., Welp E.G., Witzel U., Wieck A., Schmidt E., Ruhr University Bochum, DE

Although certain components (such as diaphragms or beams) are used recurrently in micromechanics, the degree of standardization of components that is familiear in classic mechanical engineering is still to a great extent unknown in this [...]

Modeling and Simulation of THUNDER Actuators Using ANSYS Finite Element Analysis

Kennedy C., Usher T., Mulling J., Kingon A., Think Peak, Inc., DE

The use of a quarter-symmetry three-dimensional finite element analysis model in predicting the behavior of the laminated piezoceramic material device known as THUNDER actuators is investigated. The analyses simulating the fabrication process and subsequ

Simulation of Shape Memory Devices with Coupled Finite Element Programs

Krevet B., Kohl M., Forschungszentrum Karlsruhe, DE

This paper presents thermal and mechanical calculations on micro devices driven by electrical heating of a shape memory alloy (SMA). For simulation a program packages has been developed to allow coupling of single task Finite [...]